Abstract: A method for producing a gas sensor device for detecting a gaseous analyte includes providing a sensor body comprising a semiconductor substrate, in which a cavity section is shaped, and a solid electrolyte layer arranged at a surface of the substrate. The electrolyte layer is not covered by the substrate in the cavity section. The method includes producing a signal conductor layer deposited dry-chemically at a substrate side of the sensor body, such that, in the region of the electrolyte layer not covered by the substrate in the cavity section, a cutout section is shaped in the signal conductor layer, in which the signal conductor layer is removed or not deposited. The method includes applying measuring electrodes to the electrolyte layer by a wet-chemical process. One measuring electrode is arranged in the cutout section and one measuring electrode is arranged on an electrolyte layer side of the sensor body.

Abstract: A sensor device for detecting and/or measuring gases includes two electrodes. A thin-layered proton-conductive material is fitted between the two electrodes. The gas can be detected and/or measured by a proton gradient that arises due to different gas concentrations.

Abstract: A semiconductor-based gas sensor assembly for detecting a gas includes a gas-sensitive structure with a gas electrode, an electrode, and a dielectric layer, and also includes a readout transistor and a substrate. The dielectric layer is positioned between the gas electrode and the electrode, and is at least partially polarized. The readout transistor is positioned in or on the substrate, and includes a gate. The gas-sensitive structure is configured to form a capacitance that is coupled to the gate of the readout transistor.

Abstract: A method for producing a gas sensor device for detecting a gaseous analyte includes providing a sensor body comprising a semiconductor substrate, in which a cavity section is shaped, and a solid electrolyte layer arranged at a surface of the substrate. The electrolyte layer is not covered by the substrate in the cavity section. The method includes producing a signal conductor layer deposited dry-chemically at a substrate side of the sensor body, such that, in the region of the electrolyte layer not covered by the substrate in the cavity section, a cutout section is shaped in the signal conductor layer, in which the signal conductor layer is removed or not deposited. The method includes applying measuring electrodes to the electrolyte layer by a wet-chemical process. One measuring electrode is arranged in the cutout section and one measuring electrode is arranged on an electrolyte layer side of the sensor body.

Abstract: A microelectrochemical sensor includes an energy supply unit and a sensor unit. The energy supply unit is configured to generate electrical energy using a reference fluid. The sensor unit is configured to determine a concentration difference of a chemical species between a measuring fluid and the reference fluid. The measuring fluid has an unknown concentration of the species, and the reference fluid has a known concentration of the species. The sensor unit is electrically connected to the energy supply unit and is designed to determine the concentration difference using the electrical energy from the energy supply unit.

Abstract: A device, a method, and a use thereof for detecting a concentration of a gas or of a gas component. The device as a gas sensor includes at least one sensor element including a gas-sensitive layer and a heating element for heating the gas-sensitive layer. The heating element is able to heat the sensitive layer to a desired temperature prior to the detection and/or is able to maintain it at a desired temperature during the detection. The heating element allows the gas-sensitive layer to be outgassed if needed, so as to allow absorption again. To heat the heating element, there is a first contacting to which a first voltage may be applied. Moreover, subsequent to the heating step, a second voltage may be applied to the sensor element or to the gas-sensitive layer for measured value detection with the aid of a second contacting.

Abstract: A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.

Abstract: A sensor device for sensing a gas includes a sensing region, and a readout region that is electrically and mechanically connected to the sensing region by way of a connecting web. The readout region, the sensing region, and the connecting web are formed from a substrate, and are isolated from the substrate by a clearance cutout. The sensing region has an ion-conducting region configured to provide a measuring signal dependent on the gas. The readout region (is configured to read out the measuring signal.

Abstract: A microelectrochemical sensor having a diaphragm, a web, a first and a second electrode. The diaphragm is permeable to ions of a chemical species, is arranged transversely with respect to a cutout in a base body, and closes off the cutout in a fluid-tight fashion. The web is arranged on a first side of the diaphragm between a first partial surface and a second partial surface, and is designed to adjust a temperature of the diaphragm to an operating temperature using electrical energy. The first electrode has a first partial electrode and a second partial electrode, is permeable to fluid, and is arranged on the first side of the diaphragm. The web prevents electrical contact between the first electrode and the diaphragm. The second electrode has a third partial electrode and a fourth partial electrode, is also permeable to fluid, and is arranged on a second side of the diaphragm.

Abstract: A sensor element for the qualitative and/or quantitative detection of a gas includes a front electrode configured to be exposed to the gas to be measured, a back electrode, and an electrically insulating layer positioned between front electrode and back electrode. The front electrode and the back electrode can be electrically contact connected to an AC voltage source for a qualitative and/or quantitative detection of a gas. The electrically insulating layer is at least locally polarizable in such a way that in a polarized state the electrically insulating layer has a relative permittivity which is lower than in a non-polarized state by a factor in a range of greater than or equal to 1.1.

Abstract: A device, a method, and a use thereof for detecting a concentration of a gas or of a gas component. The device as a gas sensor includes at least one sensor element including a gas-sensitive layer and a heating element for heating the gas-sensitive layer. The heating element is able to heat the sensitive layer to a desired temperature prior to the detection and/or is able to maintain it at a desired temperature during the detection. The heating element allows the gas-sensitive layer to be outgassed if needed, so as to allow absorption again. To heat the heating element, there is a first contacting to which a first voltage may be applied. Moreover, subsequent to the heating step, a second voltage may be applied to the sensor element or to the gas-sensitive layer for measured value detection with the aid of a second contacting.

Abstract: A sensor device for detecting and/or measuring gases includes two electrodes. A thin-layered proton-conductive material is fitted between the two electrodes. The gas can be detected and/or measured by a proton gradient that arises due to different gas concentrations.

Abstract: A method for analyzing a gas includes measuring a concentration of a chemical species of the gas in a measuring space of a gas sensor. The gas sensor has a semiconductor substrate with an electrical circuit and a first thin-film ion conductor that separates a reference space for a reference gas from the measuring space for the gas. The first thin-film ion conductor has a reference electrode that faces the reference space and a measuring electrode that faces the measuring space. The reference electrode and the measuring electrode are connected to the electrical circuit. The measuring of the chemical species includes picking off an electrical voltage between the reference electrode and the measuring electrode of the gas sensor. A partial pressure of the chemical species in the gas is determined by processing the electrical voltage in the electrical circuit by using a stored processing specification.

Abstract: A sensor element for the qualitative and/or quantitative detection of a gas includes a front electrode configured to be exposed to the gas to be measured, a back electrode, and an electrically insulating layer positioned between front electrode and back electrode. The front electrode and the back electrode can be electrically contact connected to an AC voltage source for a qualitative and/or quantitative detection of a gas. The electrically insulating layer is at least locally polarizable in such a way that in a polarized state the electrically insulating layer has a relative permittivity which is lower than in a non-polarized state by a factor in a range of greater than or equal to 1.1.

Abstract: A method for analyzing a gas at a heatable element for a lambda probe includes reading a value of a heating power available to the heatable element for maintaining a predetermined temperature of the heatable element, and determining a gas composition of the gas at the heatable element using the value of the heating power.

Abstract: A sensor device for sensing a gas includes a sensing region, and a readout region that is electrically and mechanically connected to the sensing region by way of a connecting web. The readout region, the sensing region, and the connecting web are formed from a substrate, and are isolated from the substrate by a clearance cutout. The sensing region has an ion-conducting region configured to provide a measuring signal dependent on the gas. The readout region (is configured to read out the measuring signal.

Abstract: A microelectrochemical sensor includes an energy supply unit and a sensor unit. The energy supply unit is configured to generate electrical energy using a reference fluid. The sensor unit is configured to determine a concentration difference of a chemical species between a measuring fluid and the reference fluid. The measuring fluid has an unknown concentration of the species, and the reference fluid has a known concentration of the species. The sensor unit is electrically connected to the energy supply unit and is designed to determine the concentration difference using the electrical energy from the energy supply unit.

Abstract: An exhaust gas sensor device for recording a concentration of at least one exhaust gas component in an exhaust system of an internal combustion engine includes at least one exhaust gas sensor with intrinsic signal amplification. The at least one exhaust gas sensor records the concentration of at least one exhaust gas component.

Abstract: A microelectrochemical sensor having a diaphragm, a web, a first and a second electrode. The diaphragm is permeable to ions of a chemical species, is arranged transversely with respect to a cutout in a base body, and closes off the cutout in a fluid-tight fashion. The web is arranged on a first side of the diaphragm between a first partial surface and a second partial surface, and is designed to adjust a temperature of the diaphragm to an operating temperature using electrical energy. The first electrode has a first partial electrode and a second partial electrode, is permeable to fluid, and is arranged on the first side of the diaphragm. The web prevents electrical contact between the first electrode and the diaphragm. The second electrode has a third partial electrode and a fourth partial electrode, is also permeable to fluid, and is arranged on a second side of the diaphragm.

Abstract: A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.