Patents by Inventor Denis Randet

Denis Randet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photolithographic method for high resolution circle patterning utilizing calibrated opaque microspheres
    Patent number: 5776644
    Abstract: A photolithographic method for patterning small diameter circles at a high resolution on a layer, comprises the steps of depositing a resist layer on said layer; depositing calibrated microspheres, opaque to a radiation, on the surface of the resist layer; and irradiating said resist layer with said radiation.
    Type: Grant
    Filed: October 23, 1995
    Date of Patent: July 7, 1998
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Jean-Frederic Clerc, Denis Randet