Patents by Inventor Denis Rideau
Denis Rideau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Integrated circuit comprising a single photon avalanche diode and corresponding manufacturing method
Patent number: 11949035Abstract: A single photon avalanche diode (SPAD) includes a PN junction in a semiconductor well doped with a first type of dopant. The PN junction is formed between a first region doped with the first type of dopant and a second region doped with a second type of dopant opposite to the first type of dopant. The first doped region is shaped so as to incorporate local variations in concentration of dopants that are configured, in response to a voltage between the second doped region and the semiconductor well that is greater than or equal to a level of a breakdown voltage of the PN junction, to generate a monotonic variation in the electrostatic potential between the first doped region and the semiconductor well.Type: GrantFiled: December 9, 2021Date of Patent: April 2, 2024Assignees: STMicroelectronics (Crolles 2) SAS, STMicroelectronics (Research & Development) LimitedInventors: Denis Rideau, Dominique Golanski, Alexandre Lopez, Gabriel Mugny -
Publication number: 20230178677Abstract: The present disclosure relates to a photodiode comprising a first part made of silicon and a second part made of doped germanium lying on and in contact with the first part, the first part comprising a stack of a first area and of a second area forming a p-n junction and the doping level of the germanium increasing as the distance from the p-n junction increases.Type: ApplicationFiled: December 28, 2022Publication date: June 8, 2023Applicant: STMicroelectronics (Crolles 2) SASInventors: Younes BENHAMMOU, Dominique GOLANSKI, Denis RIDEAU
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Patent number: 11581449Abstract: The present disclosure relates to a photodiode comprising a first part made of silicon and a second part made of doped germanium lying on and in contact with the first part, the first part comprising a stack of a first area and of a second area forming a p-n junction and the doping level of the germanium increasing as the distance from the p-n junction increases.Type: GrantFiled: December 4, 2019Date of Patent: February 14, 2023Assignee: STMicroelectronics (Crolles 2) SASInventors: Younes Benhammou, Dominique Golanski, Denis Rideau
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INTEGRATED CIRCUIT COMPRISING A SINGLE PHOTON AVALANCHE DIODE AND CORRESPONDING MANUFACTURING METHOD
Publication number: 20220190184Abstract: A single photon avalanche diode (SPAD) includes a PN junction in a semiconductor well doped with a first type of dopant. The PN junction is formed between a first region doped with the first type of dopant and a second region doped with a second type of dopant opposite to the first type of dopant. The first doped region is shaped so as to incorporate local variations in concentration of dopants that are configured, in response to a voltage between the second doped region and the semiconductor well that is greater than or equal to a level of a breakdown voltage of the PN junction, to generate a monotonic variation in the electrostatic potential between the first doped region and the semiconductor well.Type: ApplicationFiled: December 9, 2021Publication date: June 16, 2022Applicants: STMicroelectronics (Crolles 2) SAS, STMicroelectronics (Research & Development) LimitedInventors: Denis RIDEAU, Dominique GOLANSKI, Alexandre LOPEZ, Gabriel MUGNY -
Patent number: 11049892Abstract: A multispectral image sensor includes a semiconductor layer and a number of pixels formed inside and on top of the semiconductor layer. The pixels include a first pixel of a first type formed inside and on top of a first portion of the semiconductor layer and a second pixel of a second type formed inside and on top of a second portion of the semiconductor layer. The first pixel has a first thickness that defines a vertical cavity resonating at a first wavelength and the second pixel has a second thickness different from the first thickness. The second thickness defines a vertical cavity resonating at a second wavelength different than the first wavelength.Type: GrantFiled: June 25, 2019Date of Patent: June 29, 2021Assignee: STMICROELECTRONICS (CROLLES 2) SASInventors: Axel Crocherie, Denis Rideau
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Patent number: 10903259Abstract: A multispectral image sensor includes a semiconductor layer and a number of pixels formed inside and on top of the semiconductor layer. Each pixel includes an active photosensitive area formed in a portion of the semiconductor layer laterally delimited by peripheral insulating walls. The pixels include a first pixel of a first type and a second pixel of a second type. The portion of semiconductor layer of the first pixel has a first lateral dimension selected to define a lateral cavity resonating at a first wavelength and the portion of semiconductor layer of the second pixel has a second lateral dimension different from the first lateral dimension. The second lateral dimension is selected to define a lateral cavity resonating at a second wavelength different from the first wavelength.Type: GrantFiled: June 25, 2019Date of Patent: January 26, 2021Assignee: STMICROELECTRONICS (CROLLES 2) SASInventors: Denis Rideau, Axel Crocherie
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Publication number: 20200203547Abstract: The present disclosure relates to a photodiode comprising a first part made of silicon and a second part made of doped germanium lying on and in contact with the first part, the first part comprising a stack of a first area and of a second area forming a p-n junction and the doping level of the germanium increasing as the distance from the p-n junction increases.Type: ApplicationFiled: December 4, 2019Publication date: June 25, 2020Inventors: Younes BENHAMMOU, Dominique GOLANSKI, Denis RIDEAU
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Publication number: 20200013820Abstract: A multispectral image sensor includes a semiconductor layer and a number of pixels formed inside and on top of the semiconductor layer. Each pixel includes an active photosensitive area formed in a portion of the semiconductor layer laterally delimited by peripheral insulating walls. The pixels include a first pixel of a first type and a second pixel of a second type. The portion of semiconductor layer of the first pixel has a first lateral dimension selected to define a lateral cavity resonating at a first wavelength and the portion of semiconductor layer of the second pixel has a second lateral dimension different from the first lateral dimension. The second lateral dimension is selected to define a lateral cavity resonating at a second wavelength different from the first wavelength.Type: ApplicationFiled: June 25, 2019Publication date: January 9, 2020Inventors: Denis Rideau, Axel Crocherie
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Publication number: 20200013812Abstract: A multispectral image sensor includes a semiconductor layer and a number of pixels formed inside and on top of the semiconductor layer. The pixels include a first pixel of a first type formed inside and on top of a first portion of the semiconductor layer and a second pixel of a second type formed inside and on top of a second portion of the semiconductor layer. The first pixel has a first thickness that defines a vertical cavity resonating at a first wavelength and the second pixel has a second thickness different from the first thickness. The second thickness defines a vertical cavity resonating at a second wavelength different than the first wavelength.Type: ApplicationFiled: June 25, 2019Publication date: January 9, 2020Inventors: Axel Crocherie, Denis Rideau
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Patent number: 9543214Abstract: The invention concerns a method of forming a semiconductor layer having uniaxial stress including: forming, in a semiconductor structure having a stressed semiconductor layer, one or more first isolation trenches in a first direction for delimiting a first dimension of at least one transistor to be formed in said semiconductor structure; forming, in the semiconductor structure, one or more second isolation trenches in a second direction for delimiting a second dimension of the at least one transistor, the first and second isolation trenches being at least partially filled with an insulating material; and before or after the formation of the second isolation trenches, decreasing the viscosity of the insulating material in the first isolation trenches by implanting atoms of a first material into the first isolation trenches, wherein atoms of the first material are not implanted into the second isolation trenches.Type: GrantFiled: October 28, 2014Date of Patent: January 10, 2017Assignees: STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SAS, STMICROELECTRONICS, INC.Inventors: Denis Rideau, Elise Baylac, Emmanuel Josse, Pierre Morin, Olivier Nier
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Patent number: 9514996Abstract: A process for fabricating field-effect transistors, including providing a first semiconductor band surmounted with a first semiconductor layer; providing a second semiconductor band surmounted with a second semiconductor layer; providing a buried insulating layer; providing a deep trench isolation passing through the buried insulating layer and isolating the first semiconductor band from the second semiconductor band; etching the first semiconductor band so as to form a first row of semiconductor islands; etching the second semiconductor band so as to form a second row of semiconductor islands; and forming sacrificial gates on the first semiconductor layer and on the second semiconductor layer.Type: GrantFiled: April 15, 2016Date of Patent: December 6, 2016Assignee: Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Francois Andrieu, Denis Rideau
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Publication number: 20160307809Abstract: A process for fabricating field-effect transistors, including providing a first semiconductor band surmounted with a first semiconductor layer; providing a second semiconductor band surmounted with a second semiconductor layer; providing a buried insulating layer; providing a deep trench isolation passing through the buried insulating layer and isolating the first semiconductor band from the second semiconductor band; etching the first semiconductor band so as to form a first row of semiconductor islands; etching the second semiconductor band so as to form a second row of semiconductor islands; and forming sacrificial gates on the first semiconductor layer and on the second semiconductor layer.Type: ApplicationFiled: April 15, 2016Publication date: October 20, 2016Applicant: Commissariat a L'Energie Atomique et aux Energies AlternativesInventors: Francois ANDRIEU, Denis RIDEAU
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Patent number: 9356090Abstract: A substrate includes an active region oriented along a crystallographic face (100) and limited by an insulating region. A MOS transistor includes a channel oriented longitudinally along a crystallographic direction of the <110> type. A basic pattern made of metal and formed in the shape of a T is electrically inactive and situated over an area of the insulating region adjacent a transverse end of the channel. A horizontal branch of the T-shaped basic pattern is oriented substantially parallel to the longitudinal direction of the channel.Type: GrantFiled: March 6, 2015Date of Patent: May 31, 2016Assignees: STMicroelectronics (Crolles 2) SAS, STMicroelectronics SAInventors: Vincent Fiori, Sebastien Gallois-Garreignot, Denis Rideau, Clement Tavernier
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Patent number: 9331175Abstract: The disclosure concerns a method of stressing a semiconductor layer comprising: depositing, over a semiconductor on insulator (SOI) structure having a semiconductor layer in contact with an insulating layer, a stress layer; locally stressing said semiconductor layer by forming one or more openings in said stress layer, said openings being aligned with first regions of said semiconductor layer in which transistor channels are to be formed; and deforming second regions of said insulating layer adjacent to said first regions by temporally decreasing, by annealing, the viscosity of said insulator layer.Type: GrantFiled: August 5, 2014Date of Patent: May 3, 2016Assignees: STMicroelectronics SA, STMicroelectronics, Inc.Inventors: Pierre Morin, Denis Rideau, Olivier Nier
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Patent number: 9318372Abstract: One or more embodiments of the disclosure concerns a method of forming a stressed semiconductor layer involving: forming, in a surface of a semiconductor structure having a semiconductor layer in contact with an insulator layer, at least two first trenches in a first direction; introducing, via the at least two first trenches, a stress in the semiconductor layer and temporally decreasing, by annealing, the viscosity of the insulator layer; and extending the depth of the at least two first trenches to form first isolation trenches in the first direction delimiting a first dimension of at least one transistor to be formed in the semiconductor structure.Type: GrantFiled: October 28, 2014Date of Patent: April 19, 2016Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS, STMicroelectronics, Inc.Inventors: Olivier Nier, Denis Rideau, Pierre Morin, Emmanuel Josse
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Publication number: 20160099183Abstract: The transverse mechanical stress within the active region of a MOS transistor is relaxed by forming an insulating incursion, such as an insulated trench, within the active region of the MOS transistor. The insulated incursion is provided at least in a channel region of the MOS transistor so as to separate the channel region into two parts. The insulated incursion is configured to extend in a direction of a length of the MOS transistor. The insulated incursion may further extend into one or more of a source region or drain region located adjacent the channel region of the MOS transistor.Type: ApplicationFiled: December 11, 2015Publication date: April 7, 2016Applicants: STMicroelectronics (Crolles 2) SAS, STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Denis Rideau, Elise Baylac, Emmanuel Richard, Francois Andrieu
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Patent number: 9305828Abstract: One or more embodiments of the invention concerns a method of forming a semiconductor layer having uniaxial stress including: forming, in a surface of a semiconductor structure having a stressed semiconductor layer and an insulator layer, at least two first trenches in a first direction delimiting a first dimension of at least one first transistor to be formed in the semiconductor structure; performing a first anneal to decrease the viscosity of the insulating layer; and forming, in the surface after the first anneal, at least two second trenches in a second direction delimiting a second dimension of the at least one transistor.Type: GrantFiled: October 28, 2014Date of Patent: April 5, 2016Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SASInventors: Denis Rideau, Emmanuel Josse, Olivier Nier
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Patent number: 9240466Abstract: The disclosure concerns a method of stressing a semiconductor layer comprising: forming, over a silicon on insulator structure having a semiconductor layer in contact with an insulating layer, one or more stressor blocks aligned with first regions of said semiconductor layer in which transistor channels are to be formed, wherein said stressor blocks are stressed such that they locally stress said semiconductor layer; and deforming second regions of said insulating layer adjacent to said first regions by temporally decreasing, by annealing, the viscosity of said insulator layer.Type: GrantFiled: August 4, 2014Date of Patent: January 19, 2016Assignees: STMicroelectronics SA, STMicroelectronics, Inc.Inventors: Pierre Morin, Denis Rideau, Olivier Nier
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Publication number: 20150311277Abstract: A substrate includes an active region oriented along a crystallographic face (100) and limited by an insulating region. A MOS transistor includes a channel oriented longitudinally along a crystallographic direction of the <110> type. A basic pattern made of metal and formed in the shape of a T is electrically inactive and situated over an area of the insulating region adjacent a transverse end of the channel. A horizontal branch of the T-shaped basic pattern is oriented substantially parallel to the longitudinal direction of the channel.Type: ApplicationFiled: March 6, 2015Publication date: October 29, 2015Applicants: STMicroelectronics (Crolles 2) SAS, STMicroelectronics SAInventors: Vincent Fiori, Sebastien Gallois-Garreignot, Denis Rideau, Clement Tavernier
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Publication number: 20150118805Abstract: The invention concerns a method of forming a semiconductor layer having uniaxial stress including: forming, in a semiconductor structure having a stressed semiconductor layer, one or more first isolation trenches in a first direction for delimiting a first dimension of at least one transistor to be formed in said semiconductor structure; forming, in the semiconductor structure, one or more second isolation trenches in a second direction for delimiting a second dimension of the at least one transistor, the first and second isolation trenches being at least partially filled with an insulating material; and before or after the formation of the second isolation trenches, decreasing the viscosity of the insulating material in the first isolation trenches by implanting atoms of a first material into the first isolation trenches, wherein atoms of the first material are not implanted into the second isolation trenches.Type: ApplicationFiled: October 28, 2014Publication date: April 30, 2015Inventors: Denis Rideau, Elise Baylac, Emmanuel Josse, Pierre Morin, Olivier Nier