Abstract: Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.

Abstract: Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.

Abstract: Tunable vibration energy scavengers and methods of operating the same are disclosed. The disclosed energy scavengers comprise a beam with a main body, wherein the beam comprises at least one flap and means for changing a shape of the at least one flap, wherein the at least one flap is physically attached to the main body along a longitudinal side of the main body. The disclosed methods comprise tuning the shape of the at least one flap, thereby tuning the stiffness of the structure.

Abstract: A microstructure according to embodiments of the present invention comprises a substrate, and a resonant structure having a resonance frequency and comprising a seismic mass and suspension elements for suspending the seismic mass at two opposite sides onto the substrate. The substrate is adapted for functioning as a tuning actuator adapted for applying stress onto the suspension elements, thus changing the stiffness of the suspension elements. This way, the resonance frequency of the microstructure may be adapted to input vibration frequencies which may vary over time or may initially be unknown. By adapting the resonance frequency of the resonant structure, a suitable power may be generated, even in circumstances of variable input frequencies.

Abstract: A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body (28) and a plurality of fingers (22) extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers (21) extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.

Abstract: An electromagnetic energy scavenger (10) for converting kinetic energy into electrical energy comprises at least one permanent magnet (12) and one or more coils (11) lying in a coil plane, the one or more coils being electrically interconnected for delivery of electrical energy. Upon mechanical movement of the energy scavenger (10), the at least one permanent magnet (12) is freely movable relative to the coils (11) in a plane parallel to the coil plane, thus generating an electrical field in at least one coil (11).

Abstract: Tunable vibration energy scavengers and methods of operating the same are disclosed. The disclosed energy scavengers comprise a beam with a main body, wherein the beam comprises at least one flap and means for changing a shape of the at least one flap, wherein the at least one flap is physically attached to the main body along a longitudinal side of the main body. The disclosed methods comprise tuning the shape of the at least one flap, thereby tuning the stiffness of the structure.

Abstract: A microstructure has a substrate, a fixed electrode having a plurality of fixed fingers fixed to the substrate, a movable electrode having a body (28) and a plurality of fingers (22) extending from the body, the movable electrode being movable relative to the fixed fingers to vary a capacitance of the electrodes. The fixed fingers (21) extend in a first plane parallel to a main surface of the substrate, wherein the body of the movable electrode extends in a second plane adjacent to the first plane so that the body faces at least some of the plurality of fixed fingers. Such vertical integration can help enable such devices to be made more compact.

Abstract: To make available to the vehicle control systems more information on the forces and directions of the forces which act on the individual tires, in order to determine these forces, the displacements between the outer ring and inner ring in the wheel bearings are measured in a contactless fashion using ultrasound. Displacements are measured by one or more sets of an ultrasound transmitter and a receiver on the stationary ring and a reflection surface on the rotating ring for reflecting back the ultrasound energy. The measured time until the signal is received enables displacement to be determined. It is possible to use these displacements to calculate the forces acting from a knowledge of the spring characteristic of the wheel bearings.