Abstract: A semiconductor wafer carrier has an enclosure with a door frame defining an opening for insertion and removal of wafers, a door for closing and sealing said opening, and separately formed door guides for controlling the interface between said door and the enclosure. In a preferred embodiment, the door guides each comprise a first body and a second body connected to each other by a web. Each body includes a door contacting portion and a door frame contacting portion. The door frame contacting portion has a sloped segment configured to a slidingly, progressively, and cooperatively engage the door frame to properly position the door within the door frame during closure with minimal particle generation by such contact. In this preferred embodiment, the guide is configured to be attached onto a corner edge of a door.

Abstract: A semiconductor wafer carrier has an enclosure with a door frame defining an opening for insertion and removal of wafers, a door for closing and sealing said opening, and separately formed door guides for controlling the interface between said door and the enclosure. In a preferred embodiment, the door guides each comprise a first body and a second body connected to each other by a web. Each body includes a door contacting portion and a door frame contacting portion. The door frame contacting portion has a sloped segment configured to slidingly, progressively, and cooperatively engage the door frame to properly position the door within door frame during closure with minimal particle generation by such contact. In this preferred embodiment, the guide is configured to be attached onto a corner edge of a door. In this arrangement, as the door is inserted into the door frame in the z-direction, the first and second bodies exert centering forces as needed in the x and y directions on corner portions of the door.

Abstract: In a preferred embodiment of the invention, a transport module suitable for 300 mm wafers has a cushioning system that attaches to the interior of an enclosure door. The system comprises a pair of upright parallel cushions, each comprising an elongate base portion with a plurality of integral fingers extending at an acute angle from the base members. Each sequential finger of each cushion engaging every other wafer. Each finger having an arm portion and a wafer engaging portion. The wafer engaging portion comprising a curved convex surface to provide minimal vertical line contact with the circumferential outer surface of the wafer without providing axial constrainment of the wafer. The base portions are attached to the inside facing door panels by a plurality of attachment portions each comprising a split shank portion that extends through the aperture and a plurality of flange portions on the ends of the split shank portions for securing the base portions to the inside panel.

Abstract: A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that a non-interrupted path-to-ground extends from each wafer support shelf to the machine interface. Additionally, the side walls of the shell have a recess portion with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to rotatably lock such handles into place on the side walls of the carrier.

Abstract: A wafer container has an open front defined by a door receiving frame and a door sized for the door receiving frame. The door receiving frame has slots on opposite sides and the door utilizes latching linkages and lifting linkages cooperate to extend, lift, lower and retract the latching portions from the door into and out of latch receptacles on the door receiving frame. The door may also have passive wafer cushions or active wafer engaging arms which extend inwardly toward the wafers to secure said wafers when the door is in place. The latching linkages, lifting linkages, and where desired the retaining arms are linked to rotatable cammed members in the interiors if the door. The cammed member utilizes cammed surfaces configured to first extend the latching portions in a first direction into the latching receptacles and to then move the latching portions in a second direction normal to the first direction to pull the door inwardly and to seal the door to the container portion.

Abstract: A cover and folding handle assembly for rotating the drive input member of a window operator to open and close a window, including a handle base drivingly engaging the drive input member and an elongate handle having a first end pivotally connected to the handle base so that the handle is movable between an extended position in which the handle is operable to rotate the drive input member and a folded storage position in which the handle overlies the handle base. An opening in the second end of the handle is aligned with an opening in a knob, and an axial pin has a first end received in one of the aligned openings and a second end received in the other of the aligned openings. A rotatably fixed end of the pin is frictionally secured in one of the openings, and the other pin end is received in a sleeve frictionally secured in the other opening and securing a pin head in that opening. The cover has an opening through which the drive input member on the window operator extends.