Patents by Inventor Dennis Kemperman

Dennis Kemperman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support structure for wafer table
    Patent number: 9146480
    Abstract: The invention relates to a support structure for supporting a wafer table in a lithography system, said support structure comprising: a base comprising a reference surface, an interface member, made from a low thermal expansion material, arranged on top of said base and adapted for positioning said wafer table on the support structure, wherein said interface member is connected to said reference surface via at least one strut, and wherein the at least one strut is made from a low thermal expansion material. The invention further relates to a lithography system comprising such a support structure.
    Type: Grant
    Filed: September 7, 2012
    Date of Patent: September 29, 2015
    Assignee: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Pieter Kappelhof, Jerry Johannes Martinus Peijster, Dennis Kemperman
  • SUPPORT STRUCTURE FOR WAFER TABLE
    Publication number: 20130063712
    Abstract: The invention relates to a support structure for supporting a wafer table in a lithography system, said support structure comprising: a base comprising a reference surface, an interface member, made from a low thermal expansion material, arranged on top of said base and adapted for positioning said wafer table on the support structure, wherein said interface member is connected to said reference surface via at least one strut, and wherein the at least one strut is made from a low thermal expansion material. The invention further relates to a lithography system comprising such a support structure.
    Type: Application
    Filed: September 7, 2012
    Publication date: March 14, 2013
    Inventors: Pieter Kappelhof, Jerry Johannes Martinus Peijster, Dennis Kemperman