Patents by Inventor Dennis Klesel

Dennis Klesel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas coupled arc chamber cooling
    Patent number: 9275820
    Abstract: An ion implantation system, having a temperature controlled ion source chamber is disclosed. The temperature of the ion source chamber is regulated by disposing a heat sink in proximity to the ion source chamber. A gas fillable chamber is disposed between and in physical communication with both the ion source chamber and the heat sink. By controlling the amount of gas, i.e. the gas pressure, within the gas fillable chamber, the coefficient of heat transfer can be manipulated. This allows the temperature of the ion source chamber to be controlled through the application or removal of gas from the gas fillable chamber. This independent temperature control decouples the power used to heat the ion generator from the ion species that are ultimately generated.
    Type: Grant
    Filed: August 27, 2013
    Date of Patent: March 1, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: William Davis Lee, Neil J. Bassom, Dennis Klesel
  • Gas Coupled Arc Chamber Cooling
    Publication number: 20150061490
    Abstract: An ion implantation system, having a temperature controlled ion source chamber is disclosed. The temperature of the ion source chamber is regulated by disposing a heat sink in proximity to the ion source chamber. A gas fillable chamber is disposed between and in physical communication with both the ion source chamber and the heat sink. By controlling the amount of gas, i.e. the gas pressure, within the gas fillable chamber, the coefficient of heat transfer can be manipulated. This allows the temperature of the ion source chamber to be controlled through the application or removal of gas from the gas fillable chamber. This independent temperature control decouples the power used to heat the ion generator from the ion species that are ultimately generated.
    Type: Application
    Filed: August 27, 2013
    Publication date: March 5, 2015
    Inventors: William Davis Lee, Neil J. Bassom, Dennis Klesel