Abstract: A probe for measuring plasma parameters by means of active plasma resonance spectroscopy comprises an external coupling, a balun, an internal coupling, and a probe head. It is provided that the couplings, the balun, and the probe head are integrated in an electrically-insulating substrate cylinder, and the substrate cylinder has a layered structure made from multiple substrate layers along its rotational axis. In this way, a probe for measuring plasma parameters is provided which enables an improved measurement of the plasma parameters, wherein the plasma is influenced as little as possible during the measurement of the plasma parameters.

Abstract: A probe for measuring plasma parameters by means of active plasma resonance spectroscopy comprises an external coupling, a balun, an internal coupling, and a probe head. It is provided that the couplings, the balun, and the probe head are integrated in an electrically-insulating substrate cylinder, and the substrate cylinder has a layered structure made from multiple substrate layers along its rotational axis. In this way, a probe for measuring plasma parameters is provided which enables an improved measurement of the plasma parameters, wherein the plasma is influenced as little as possible during the measurement of the plasma parameters.

Abstract: The laser processing machine includes a beam oscillation mechanism that oscillates a beam spot on a surface of a sheet metal. The control device controls the beam oscillation mechanism so as to oscillate the beam spot with an oscillation component in a direction orthogonal to a cutting direction of the sheet metal in a non-holding region, in which a holding portion of the conveyance apparatus for conveying a product is not held, when cutting the product from the sheet metal by irradiating the sheet metal with the laser beam. The non-holding region is at least a part of a periphery of a protrusion portion of the product, or at least a part of a periphery of a recess forming region in which a recess of the product is formed.

Abstract: The laser processing machine includes a beam oscillation mechanism that oscillates a beam spot on a surface of a sheet metal. The control device controls the beam oscillation mechanism so as to oscillate the beam spot with an oscillation component in a direction orthogonal to a cutting direction of the sheet metal in a non-holding region, in which a holding portion of the conveyance apparatus for conveying a product is not held, when cutting the product from the sheet metal by irradiating the sheet metal with the laser beam. The non-holding region is at least a part of a periphery of a protrusion portion of the product, or at least a part of a periphery of a recess forming region in which a recess of the product is formed.