Abstract: The anode of an electroplating apparatus is incorporated in a sparging plenum. The plenum has an insulating partition separating the anodically biased electrode from the workpieces being plated. The partition has a regular array of orifices. Electrolyte is pumped into the plenum and flows out of the partition, providing a spacially uniform supply of fresh solution to the workpieces. In a soluble anode process, the solution is replenished in the plenum. In an exemplary apparatus, one major surface of the plenum is a titanium tray, which holds pieces of nickel, which dissolve during the nickel plating process.

Abstract: Electroplating procedures and apparatus are described in which the metal plated out of the bath is replenished by a consumable anode. Particular attention is paid to the design of the anode assembly so as to facilitate rapid replenishment of the consumable part of the anode without introducing electrical resistances which results in nonuniform plating.