Abstract: An optical-interference microphone having a high sensitivity and bandwidth, and that is suitable to be manufactured by micromachining techniques. The microphone includes a back member, a diaphragm and an air gap formed between the back member and diaphragm. Further, the diaphragm includes a plurality of holes. The microphone utilizes optical interference to sense the sound-induced motion of the diaphragm. A light source and detector can be included as components of the microphone or can be at a remote location and connected to the microphone with an optical fiber.

Abstract: An article comprising an optical cavity includes two mirrors, at least one of which is advantageously movable, that are spaced from and parallel to one another. In some embodiments, both mirrors are formed from unstressed single crystal silicon. The single crystal silicon used in some embodiments is advantageously sourced from single crystal silicon-on-insulator (“SOI”) wafers. In a method in accordance with the present invention, a first mirror is patterned in the thin silicon layer of a first SOI wafer. A standoff is disposed on the thin silicon layer near the first mirror. The thin silicon layer of a second SOI wafer is attached to the standoff such that there is a gap between the two, spaced, thin silicon layers. The thin silicon layer of the second SOI wafer is released forming a movable mirror by removing the thick layer of silicon and the buried oxide from that wafer.

Abstract: An optical attenuator having a structure in which a membrane covers a cavity formed on a substrate is disclosed. The membrane covering the cavity formed in the substrate is movable relative to the bottom surface of the cavity constituting a deformable mirror. Movement of the membrane relative to the bottom surface of the cavity attenuates optical signals impinging on the surface thereof. The movement of the membrane relative to the bottom surface of the cavity attenuates impinging optical signals by controlling the angle at which such impinging optical signals are reflected from the membrane surface.

Abstract: An electro-optic device which includes a mirror array attached to a base substrate is disclosed. The mirror array comprises a substrate having a plurality of spaced-apart mirrors with underlying cavities (each having a diameter at least about the same size as that of the overlying mirror) formed therein. The base substrate includes a plurality of electrodes as well as a plurality of electrical interconnections. The mirror array is attached to the base substrate so that each mirror of the array as well as a cavity are supported above a set of electrodes. Each mirror of the mirror array rotates relative to the major plane of the substrate in response to an electrical signal. The application of an electrical potential to each mirror relative to at least one electrode of the set of electrodes causes the desired rotation (depending on the magnitude of the electrical potential) up to an angle of about 20 degrees.

Abstract: An improved modulator and methods for making the modulator are disclosed. A membrane, preferably circular in shape, is formed over a region of a substrate in such a way that a gap results between the membrane and substrate forming a modulator cavity. The membrane forms a continuous surface over the cavity. In particular, the membrane is not supported by discrete support arms, but rather extends beyond the modulator cavity. Preferably, holes are formed in the membrane to aid in damping its motion and to allow access to underlying layers during modulator formation. According to the method, the modulator is formed by forming a means for creating a gap between the substrate and the membrane, forming a membrane, forming a lateral conduit to aid in removing the means for creating the gap and, finally, by removing the means for creating the gap.