Patents by Inventor Dennis W. Cobb

Dennis W. Cobb has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for EUV plasma source target delivery
    Patent number: 7838854
    Abstract: An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.
    Type: Grant
    Filed: July 25, 2008
    Date of Patent: November 23, 2010
    Assignee: Cymer, Inc.
    Inventors: J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Oscar Hemberg, Alexander N. Bykanov, Dennis W. Cobb
  • Method and apparatus for EUV plasma source target delivery
    Publication number: 20080283776
    Abstract: An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.
    Type: Application
    Filed: July 25, 2008
    Publication date: November 20, 2008
    Applicant: CYMER, INC.
    Inventors: J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Oscar Hemberg, Alexander N. Bykanov, Dennis W. Cobb
  • Method and apparatus for EUV plasma source target delivery
    Patent number: 7405416
    Abstract: An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.
    Type: Grant
    Filed: February 25, 2005
    Date of Patent: July 29, 2008
    Assignee: Cymer, Inc.
    Inventors: J. Martin Algots, Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Oscar Hemberg, Alexander N. Bykanov, Dennis W. Cobb