Patents by Inventor DENTON VACUUM, L.L.C.

DENTON VACUUM, L.L.C. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130084147
    Abstract: A wafer treatment system including a load lock chamber in communication with a process chamber. At least one cradle is provided in the load lock chamber, each cradle being adapted to receive a wafer-holding cassette. The wafers contained in the cassettes assume angularly justified positions. A multiaxial transfer unit picks up wafers from the cassettes and delivers them to the process chamber for treatment after which they are returned to the cassettes. Because all of the wafers lean in the same direction and to the same degree in their cassette slots, an end effector carried by the multiaxial transfer unit can reliably capture and release the wafers in order to consistently remove them from and place them into the cassettes.
    Type: Application
    Filed: October 3, 2012
    Publication date: April 4, 2013
    Applicant: DENTON VACUUM, L.L.C.
    Inventor: DENTON VACUUM, L.L.C.