Patents by Inventor Deokhyeon YUN

Deokhyeon YUN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF ETCHING ATOMIC LAYER
    Publication number: 20170316949
    Abstract: The present disclosure relates to a method of etching an atomic layer, that is capable of simultaneously removing an upper surface and a side surface of an etch subject material layer by heating with a light source of a lamp when removing the atomic layer, thereby easily reducing the planar size even in the case of patterns in the scale of several nanometers.
    Type: Application
    Filed: April 27, 2017
    Publication date: November 2, 2017
    Applicants: RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY, IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
    Inventors: Geunyoung YEOM, Kyong Nam KIM, Ki Seok KIM, Mu Kyeom MUN, Jinwoo PARK, Deokhyeon YUN, Jo-Won LEE