Patents by Inventor DEOKJIN KWON

DEOKJIN KWON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method fabricating semiconductor device
    Patent number: 12014905
    Abstract: A method of fabricating a semiconductor device include; seating a substrate having a substrate radius on an electrostatic chuck, applying first radio-frequency power to the electrostatic chuck to induce plasma in a region at least above the electrostatic chuck, and generating a magnetic field in the region at least above the electrostatic chuck using a magnet having a ring-shape and disposed above the electrostatic chuck by applying second radio-frequency power to the magnet, wherein the magnet has an inner radius ranging from about one-half to about one-fourth of the substrate radius.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: June 18, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Nam Kyun Kim, Tae-Sun Shin, Deokjin Kwon, Donghyeon Na, Seungbo Shim, Sungyong Lim, Minjoon Kim, Jin Young Bang, Bongju Lee, Jinseok Lee, Sungil Cho, Chungho Cho
  • APPARATUS AND METHOD FABRICATING SEMICONDUCTOR DEVICE
    Publication number: 20220165552
    Abstract: A method of fabricating a semiconductor device include; seating a substrate having a substrate radius on an electrostatic chuck, applying first radio-frequency power to the electrostatic chuck to induce plasma in a region at least above the electrostatic chuck, and generating a magnetic field in the region at least above the electrostatic chuck using a magnet having a ring-shape and disposed above the electrostatic chuck by applying second radio-frequency power to the magnet, wherein the magnet has an inner radius ranging from about one-half to about one-fourth of the substrate radius.
    Type: Application
    Filed: July 20, 2021
    Publication date: May 26, 2022
    Inventors: NAM KYUN KIM, TAE-SUN SHIN, DEOKJIN KWON, DONGHYEON NA, SEUNGBO SHIM, SUNGYONG LIM, MINJOON KIM, JIN YOUNG BANG, BONGJU LEE, JINSEOK LEE, SUNGIL CHO, CHUNGHO CHO