Patents by Inventor Deokkyun D. YOON

Deokkyun D. YOON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Axially compliant bearing for precision positioning
    Patent number: 10837492
    Abstract: An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the stage in the axial direction while remaining stiff in other directions orthogonal to the axial direction.
    Type: Grant
    Filed: November 2, 2016
    Date of Patent: November 17, 2020
    Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Chinedum E. Okwudire, Deokkyun D. Yoon, Xin Dong
  • AXIALLY COMPLIANT BEARING FOR PRECISION POSITIONING
    Publication number: 20180320739
    Abstract: An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the stage in the axial direction while remaining stiff in other directions orthogonal to the axial direction.
    Type: Application
    Filed: November 2, 2016
    Publication date: November 8, 2018
    Inventors: Chinedum E. OKWUDIRE, Deokkyun D. YOON, Xin DONG
  • Magnet assisted stage for vibration and heat reduction in wafer scanning
    Patent number: 10077865
    Abstract: A magnet assisted stage system for scanning applications having a scanning table being moveable from a first position to a second position, a scanning actuator operably associated with the scanning table to move the scanning table along a scanning direction from the first position to the second position, and an actively variable magnetic spring system being operably augmented to the scanning table to exert a magnetic repulsion force upon the scanning table in the scanning direction.
    Type: Grant
    Filed: June 3, 2015
    Date of Patent: September 18, 2018
    Assignee: The Regents of The University of Michigan
    Inventors: Chinedum E. Okwudire, Deokkyun D. Yoon
  • MAGNET ASSISTED STAGE FOR VIBRATION AND HEAT REDUCTION IN WAFER SCANNING
    Publication number: 20170089506
    Abstract: A magnet assisted stage system for scanning applications having a scanning table being moveable from a first position to a second position, a scanning actuator operably associated with the scanning table to move the scanning table along a scanning direction from the first position to the second position, and an actively variable magnetic spring system being operably augmented to the scanning table to exert a magnetic repulsion force upon the scanning table in the scanning direction.
    Type: Application
    Filed: June 3, 2015
    Publication date: March 30, 2017
    Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Chinedum E. OKWUDIRE, Deokkyun D. YOON