Patents by Inventor DER?apos;E JAN

DER?apos;E JAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SELECTIVE NITRIDE ETCHING WITH SILICATE ION PRE-LOADING
    Publication number: 20010001728
    Abstract: A nitride wet etch in which liquid TEOS is flowed directly into the hot phosphoric acid bath before wafer etching begins. This preloads the bath chemistry with silicate ions, and thus helps assure very high selectivity to silicon oxides.
    Type: Application
    Filed: December 18, 1998
    Publication date: May 24, 2001
    Inventors: DER?apos;E JAN, THOMAS M. PARRILL, BRIAN K. KIRKPATRICK