Abstract: A fluid injection apparatus is disclosed. A chamber wall is disposed overlying the substrate to define an area. A nozzle plate comprising a nozzle is disposed overlying the chamber wall to form a chamber on the area, wherein the chamber wall and the nozzle plate are integrated into a structure layer. A manifold is disposed in the substrate, communicated with the chamber.

Abstract: A fluid injection apparatus is disclosed. A manifold connects a plurality of fluid chambers to supply fluids thereto. A plurality of nozzles are connected to the fluid chambers respectively to eject the fluids, wherein at least two of the nozzles are not disposed along a column or a row, and distances between the nozzles and the manifold are substantially the same.

Abstract: A method for fabricating a monolithic fluid ejection device. The method includes providing a substrate with a signal transmitting circuit and a heating element. A protective layer is formed to cover the signal transmitting circuit and a heating element. A first patterned resistive layer is formed to define a predetermined sacrificial layer area. A sacrificial layer is formed on the predetermined sacrificial layer area. After removing the first resistive layer, a second patterned resistive layer is formed to define a predetermined structural layer area. After forming a structural layer, the second resistive layer is removed. A manifold is formed by etching from the back of the substrate to expose the sacrificial layer. Finally, a chamber is formed by removing the sacrificial layer.