Patents by Inventor Der-Yuan Hong

Der-Yuan Hong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Belt tensioning assembly for CMP apparatus
    Patent number: 6726532
    Abstract: A tensioning assembly for a polishing belt on a linear chemical mechanical polishing apparatus. The tensioning assembly comprises first and second rollers which are operably engaged by respective air cylinders and exert a selected degree of downward tension on the lower run of the horizontal polishing belt. A third roller biased typically by a spring pushes upwardly on the lower run of the belt between the first and second rollers. Accordingly, the first and second rollers, in conjunction with the third roller, tension the belt on the apparatus to maintain optimum material removal rates and uniformity. The degree of tension exerted on the belt can be varied according to stretching of the belt resulting from prolonged use.
    Type: Grant
    Filed: July 24, 2002
    Date of Patent: April 27, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Hun Lin, Tien-Chen Hu, Tso-Hsu Lin, Hong-Chin Pu, Jeng-Fang Chang, Der-Yuan Hong
  • Belt tensioning assembly for CMP apparatus
    Publication number: 20040018808
    Abstract: A tensioning assembly for a polishing belt on a linear chemical mechanical polishing apparatus. The tensioning assembly comprises first and second rollers which are operably engaged by respective air cylinders and exert a selected degree of downward tension on the lower run of the horizontal polishing belt. A third roller biased typically by a spring pushes upwardly on the lower run of the belt between the first and second rollers. Accordingly, the first and second rollers, in conjunction with the third roller, tension the belt on the apparatus to maintain optimum material removal rates and uniformity. The degree of tension exerted on the belt can be varied according to stretching of the belt resulting from prolonged use.
    Type: Application
    Filed: July 24, 2002
    Publication date: January 29, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung Lin, Tien-Chen Hu, Tso-Hsu Lin, Hong-Chin Pu, Jeng-Fang Chang, Der-Yuan Hong