Patents by Inventor Derek J. Witkowicki

Derek J. Witkowicki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stacked wafer cassette loading system
    Patent number: 9698036
    Abstract: A substrate cassette loading system for docking substrate cassettes to a substrate processing system is provided. A plurality of ports passes substrates into the substrate processing system, wherein a first port of the plurality of ports is vertically above a second port of the plurality of ports. A plurality of cassette loaders provides substrate cassettes to the plurality of ports.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: July 4, 2017
    Assignee: Lam Research Corporation
    Inventors: Silvia R. Aguilar, Scott Wong, Derek J. Witkowicki, Richard H. Gould, Candi Kristoffersen, Brandon Senn
  • STACKED WAFER CASSETTE LOADING SYSTEM
    Publication number: 20170133255
    Abstract: A substrate cassette loading system for docking substrate cassettes to a substrate processing system is provided. A plurality of ports passes substrates into the substrate processing system, wherein a first port of the plurality of ports is vertically above a second port of the plurality of ports. A plurality of cassette loaders provides substrate cassettes to the plurality of ports.
    Type: Application
    Filed: November 5, 2015
    Publication date: May 11, 2017
    Inventors: Silvia R. AGUILAR, Scott WONG, Derek J. Witkowicki, Richard H. GOULD, Candi KRISTOFFERSEN, Brandon SENN