Patents by Inventor Dermot Patrick Cantwell

Dermot Patrick Cantwell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE
    Publication number: 20240310825
    Abstract: A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The second data includes operational data associated with the processing recipe. The method further includes receiving third data. The third data includes historical data associated with the processing recipe. The method further includes performing analysis indicative of performance of a processing chamber based on the first, second, and third data. The method further includes causing performance of a corrective action in view of the analysis.
    Type: Application
    Filed: May 24, 2024
    Publication date: September 19, 2024
    Inventors: Dermot Patrick Cantwell, Hui-Ling Han, Moon Kyu Oh, Weili Li
  • COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE
    Publication number: 20240310826
    Abstract: A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The second data includes operational data associated with the processing recipe. The method further includes receiving third data. The third data includes historical data associated with the processing recipe. The method further includes performing analysis indicative of performance of a processing chamber based on the first, second, and third data. The method further includes causing performance of a corrective action in view of the analysis.
    Type: Application
    Filed: May 24, 2024
    Publication date: September 19, 2024
    Inventors: Dermot Patrick Cantwell, Hui-Ling Han, Moon Kyu Oh, Weili Li
  • GENERATING INDICATIONS OF LEARNING OF MODELS FOR SEMICONDUCTOR PROCESSING
    Publication number: 20240037442
    Abstract: A method includes receiving a first value associated with a first input parameter of a model. The method further includes receiving a first plurality of values associated with a second input parameter of the model. The method further includes providing to the model the first value and the first plurality of values. The method further includes receiving a first plurality of outputs from the model. The method further includes preparing the first plurality of outputs for presentation via a presentation element of a graphical user interface. The presentation element includes two axes. The first axis is associated with a first property of a first feature associated with the output from the model. The second axis is associated with a second property of the first feature.
    Type: Application
    Filed: July 26, 2022
    Publication date: February 1, 2024
    Inventor: Dermot Patrick Cantwell
  • COMPREHENSIVE ANALYSIS MODULE FOR DETERMINING PROCESSING EQUIPMENT PERFORMANCE
    Publication number: 20230280736
    Abstract: A method includes receiving, by a processing device, first data indicative of a processing recipe. The method further includes receiving second data. The second data includes operational data associated with the processing recipe. The method further includes receiving third data. The third data includes historical data associated with the processing recipe. The method further includes performing analysis indicative of performance of a processing chamber based on the first, second, and third data. The method further includes causing performance of a corrective action in view of the analysis.
    Type: Application
    Filed: February 28, 2023
    Publication date: September 7, 2023
    Inventors: Dermot Patrick Cantwell, Hui-Ling Han, Moon Kyu Oh, Weili Li