Patents by Inventor Detlef Schon

Detlef Schon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for coating a substrate by means of plasma-CVD or cathode sputtering
    Patent number: 4715319
    Abstract: A device for covering a substrate by means of both plasma chemical vapor deposition and by high-frequency cathode sputtering which, as a result of easily exchangeable individual devices to introduce gaseous substances into the reaction space as well as easily exchangeable individual devices for influencing the flow of the process gases within the reaction space, results in a very good uniformity of the layer thickness of the produced layers even when the operation has to be carried out at higher gas pressures and hence higher flow rates.
    Type: Grant
    Filed: February 27, 1987
    Date of Patent: December 29, 1987
    Assignee: U.S. Philips Corporation
    Inventors: Udo Bringmann, Klaus Drews, Detlef Schon