Patents by Inventor Detlef Schupp

Detlef Schupp has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for acquiring high-resolution images of defects on the upper surface of the wafer edge
    Patent number: 7768637
    Abstract: A method for acquiring high-resolution images of defects on the upper surface of the wafer edge is disclosed. For this purpose, first the position of at least one defect on the upper surface of the wafer edge is determined. The thus determined position of the defect is stored. Then the wafer is transferred into device for micro-inspection, in which the defect is examined more closely and imaged. The images acquired in the device for micro-inspection are deposited in a directory.
    Type: Grant
    Filed: February 25, 2008
    Date of Patent: August 3, 2010
    Assignee: Vistec Semiconductor Systems GmbH
    Inventors: Detlef Schupp, Thin Van Luu
  • Method of learning a knowledge-based database used in automatic defect classification
    Patent number: 7623698
    Abstract: The invention relates to a method of learning a knowledge-based database used in automatic defect classification. According to this method, the user is spared a series of entries as the system carries out an automatic learn mode, which requires a reduced number of user entries.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: November 24, 2009
    Assignee: KLA-Tencor MIE GmbH
    Inventors: Dirk Soenksen, Ralf Friedrich, Andreas Draeger, Detlef Schupp, Thin Van Luu, Wolfgang Langer
  • Method for acquiring high-resolution images of defects on the upper surface of the wafer edge
    Publication number: 20080204738
    Abstract: A method for acquiring high-resolution images of defects on the upper surface of the wafer edge is disclosed. For this purpose, first the position of at least one defect on the upper surface of the wafer edge is determined. The thus determined position of the defect is stored. Then the wafer is transferred into device for micro-inspection, in which the defect is examined more closely and imaged. The images acquired in the device for micro-inspection are deposited in a directory.
    Type: Application
    Filed: February 25, 2008
    Publication date: August 28, 2008
    Applicant: VISTEC Semiconductor Systems GmbH
    Inventors: Detlef Schupp, Thin Van Luu
  • Method of learning a knowledge-based database used in automatic defect classification
    Publication number: 20060245634
    Abstract: The invention relates to a method of learning a knowledge-based database used in automatic defect classification. According to this method, the user is spared a series of entries as the system carries out an automatic learn mode, which requires a reduced number of user entries.
    Type: Application
    Filed: June 3, 2004
    Publication date: November 2, 2006
    Inventors: Dirk Soenksen, Ralf Friedrich, Andreas Draeger, Detlef Schupp, Thin Van Luu, Wolfgang Langer