Abstract: The present invention is a system which enables a marketing team to initiate and sustain directed and interactive communication with thousands or millions of existing or prospective customers. In the preferred embodiment, a marketer accesses a database and selects a group of qualified prospects, using lifestyle dimensions and or demographic information, from a stable group of prospective or existing customers conducting financial transactions online. Once a prospect list is selected, the marketer designs a series of questions, typically using branch and skip logic, and the system deploys the question sequence to the target list in the form of a response-redeemable savings coupon. When prospects are next performing their financial transactions online, they are presented with a lifestyle-relevant coupon which is immediately redeemable by responding to the question/communication.

Abstract: The present invention is a system which enables a marketing team to initiate and sustain directed and interactive communication with thousands or millions of existing or prospective customers. In the preferred embodiment, a marketer accesses a database and selects a group of qualified prospects, using lifestyle dimensions and or demographic information, from a stable group of prospective or existing customers conducting financial transactions online. Once a prospect list is selected, the marketer designs a series of questions, typically using branch and skip logic, and the system deploys the question sequence to the target list in the form of a response-redeemable savings coupon. When prospects are next performing their financial transactions online, they are presented with a lifestyle-relevant coupon which is immediately redeemable by responding to the question/communication.

Abstract: The present invention is a system which enables a marketing team to initiate and sustain directed and interactive communication with thousands or millions of existing or prospective customers. In the preferred embodiment, a marketer accesses a database and selects a group of qualified prospects, using lifestyle dimensions and or demographic information, from a stable group of prospective or existing customers conducting financial transactions online. Once a prospect list is selected, the marketer designs a series of questions, typically using branch and skip logic, and the system deploys the question sequence to the target list in the form of a response-redeemable savings coupon. When prospects are next performing their financial transactions online, they are presented with a lifestyle-relevant coupon which is immediately redeemable by responding to the question/communication.

Abstract: The invention provides a system and method comprising an apparatus for removing contaminants from a gas in a semiconductor processing device, which can include a filter unit having at least two parallel filter stages located therein. The filter stages are designed to remove a least a portion of the contaminants present in the gas flowing through them. The apparatus can also include a flow controller for distributing the gas flow among the filter stages. In one embodiment, the controller may consist of a diffuser plate. The invention also provides a sampling tube orifice for gas flow control in a system or method of the invention. In another embodiment, an apparatus for removing contaminants from a gas in a clean room comprises a filter unit having at least two parallel filter stages, which are used to remove a portion of the contaminants in the gas as it passes through the apparatus.

Abstract: The present invention is a system which enables a marketing team to initiate and sustain directed and interactive communication with thousands or millions of existing or prospective customers. In the preferred embodiment, a marketer accesses a database and selects a group of qualified prospects, using lifestyle dimensions and or demographic information, from a stable group of prospective or existing customers conducting financial transactions online. Once a prospect list is selected, the marketer designs a series of questions, typically using branch and skip logic, and the system deploys the question sequence to the target list in the form of a response-redeemable savings coupon. When prospects are next performing their financial transactions online, they are presented with a lifestyle-relevant coupon which is immediately redeemable by responding to the question/communication.

Abstract: The present invention is a system which enables a marketing team to initiate and sustain directed and interactive communication with thousands or millions of existing or prospective customers. In the preferred embodiment, a marketer accesses a database and selects a group of qualified prospects, using lifestyle dimensions and or demographic information, from a stable group of prospective or existing customers conducting financial transactions online. Once a prospect list is selected, the marketer designs a series of questions, typically using branch and skip logic, and the system deploys the question sequence to the target list in the form of a response-redeemable savings coupon. When prospects are next performing their financial transactions online, they are presented with a lifestyle-relevant coupon which is immediately redeemable by responding to the question/communication, therewith lowering the respondent's bill instantaneously upon response, as in the case of online bill payment.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: The invention provides a system and method comprising an apparatus for removing contaminants from a gas in a semiconductor processing device, which can include a filter unit having at least two parallel filter stages located therein. The filter stages are designed to remove a least a portion of the contaminants present in the gas flowing through them. The apparatus can also include a flow controller for distributing the gas flow among the filter stages. In one embodiment, the controller may consist of a diffuser plate. The invention also provides a sampling tube orifice for gas flow control in a system or method of the invention. In another embodiment, an apparatus for removing contaminants from a gas in a clean room comprises a filter unit having at least two parallel filter stages, which are used to remove a portion of the contaminants in the gas as it passes through the apparatus.

Abstract: The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.

Abstract: The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: A detection system for detecting base contamination at low concentrations in gas, for instance to protect a sensitive process, characterized in that the detection system in constructed to examine multiple amines in gas to produce a reading stoichiometrically related to the proton bonding characteristic of the multiple amines present, the detection system comprising at least two channels through which a gas to be examined passes, an amines remover located in one of the channels, at least one thermal/catalytic converter which discharges NO for each channel, and at least one chemiluminescent NO detector, whereby the total amine concentration is determined from the difference between the detected signals for the channels.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: The present invention provides passive sampling systems and methods for monitoring contaminants in a semiconductor processing system. In one embodiment, that passive sampling system comprises a collection device in fluid communication with a sample line that provides a flow of gas from a semiconductor processing system. The collection device is configured to sample by diffusion one or more contaminants in the flow of gas.

Abstract: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: A preferred embodiment includes a method for monitoring the performance of a filter positioned in an airstream in a semiconductor processing system. The method includes sampling the airstream at a location upstream of the filter to detect the molecular contaminants present in the airstream; identifying a target species of the contaminants upstream; selecting a non-polluting species of a contaminant having a concentration greater than a concentration of the target species; measuring the non-polluting species in the airstream at a plurality of locations; and determining the performance of the filter with respect to the target species from measurements of the non-polluting species. The plurality of locations includes a location downstream of the filter and at a location within the filter. Further, the method for monitoring includes generating a numerical representation of a chromatogram of the airstream sampled at a location upstream of the filter.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.