Patents by Inventor Devon Pelkey

Devon Pelkey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Controlling showerhead heating via resistive thermal measurements
    Patent number: 10872747
    Abstract: A showerhead for a plasma chamber comprises a resistive heater configured to receive power to heat the showerhead of the plasma chamber, and a resistive element thermally bonded to the showerhead of the plasma chamber. The resistive element changes resistance in response to a change in temperature of the showerhead. The resistive element is encapsulated in an insulating material to electrically insulate the resistive element from the showerhead. The insulating material is a good conductor of heat. The power to the resistive heater is received based on the resistance of the resistive element.
    Type: Grant
    Filed: August 8, 2018
    Date of Patent: December 22, 2020
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Nick Ray Linebarger, Jr., Curtis W. Bailey, Easwar Srinivasan, Devon Pelkey
  • Valve operation booster
    Patent number: 10210977
    Abstract: A power converter module is connected to an electrical power supply and is configured to generate a first voltage and a second voltage for controlling operation of a valve, where the valve includes a solenoid for affecting opening and closing of the valve. The first voltage is a boost voltage for accelerating opening of the valve. The second voltage is a holding voltage for maintaining the valve in an open state. A boost control module is configured to control supply of the first voltage to the solenoid of the valve in accordance with a first state of an opening boost control signal when a valve control signal directs opening of the valve, and is configured to control supply of the second voltage to the solenoid of the valve in accordance with a second state of the opening boost control signal when the valve control signal directs opening of the valve.
    Type: Grant
    Filed: June 3, 2016
    Date of Patent: February 19, 2019
    Assignee: Lam Research Corporation
    Inventors: Devon Pelkey, Dirk Rudolph
  • Valve Operation Booster
    Publication number: 20170352461
    Abstract: A power converter module is connected to an electrical power supply and is configured to generate a first voltage and a second voltage for controlling operation of a valve, where the valve includes a solenoid for affecting opening and closing of the valve. The first voltage is a boost voltage for accelerating opening of the valve. The second voltage is a holding voltage for maintaining the valve in an open state. A boost control module is configured to control supply of the first voltage to the solenoid of the valve in accordance with a first state of an opening boost control signal when a valve control signal directs opening of the valve, and is configured to control supply of the second voltage to the solenoid of the valve in accordance with a second state of the opening boost control signal when the valve control signal directs opening of the valve.
    Type: Application
    Filed: June 3, 2016
    Publication date: December 7, 2017
    Inventors: Devon Pelkey, Dirk Rudolph