Patents by Inventor DEZAN YANG

DEZAN YANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200203197
    Abstract: The invention discloses a semiconductor multi-station processing chamber. Each of the multiple station includes a downward concave accommodation defined by walls and receives a pedestal therein. The pedestal and the walls define a first gap. A showerhead plate mounted on an upper lid above the pedestal to define a processing region. A second gap for supply swiping gas is defined between the showerhead plate and the upper lid. An isolation member is liftable between the downward concave accommodation and the showerhead plate to optionally encircle a processing region defined by the pedestal and the showerhead plate or to retract back into the downward concave accommodation. Such that, when the isolation member surrounds and encircles the processing region, the station is able to be structurally isolated from its neighboring one station.
    Type: Application
    Filed: December 12, 2019
    Publication date: June 25, 2020
    Inventors: HUAQIANG TAN, REN ZHOU, ZHUO WANG, DEZAN YANG, GIYOUL KIM, JING LI, JUNICHI ARAMI, ZHONGWU LIU, SI SHEN, BRIAN LU, SEAN CHANG, GREGORY SIU