Patents by Inventor Dhe H. Choo

Dhe H. Choo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate-heating device and boat structure for a vacuum-depositing apparatus
    Patent number: 5133286
    Abstract: A substrate-heating device and a boat structure for a vacuum depositing apparatus that is capable of depositing semiconductor film onto a substrate more uniformly. The substrate-heating device includes a plurality of divided heating blocks which are capable of detecting and controlling their respective temperatures separately and independently. The substrate-heating device further includes a plurality of substrate holders for holding substrates, these substrate holding being driven by motor, through a transmission gear, a plurality of divided heating blocks for heating substrates, and boat structure for evaporating the depositing material within a vacuum chamber.
    Type: Grant
    Filed: April 13, 1990
    Date of Patent: July 28, 1992
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Dhe H. Choo, Ie H. Song