Abstract: System and methods are disclosed to handle power imbalance in one or more distributed generation (DG) units: detecting islanding at time t1; selecting Phasor Measurement Unit (PMU) measurements during a pre-defined time window [t1-?, t1]; checking the time window for an abrupt voltage change; if no sudden change of voltage is detected, determining an average value of sPMUt between t1-? and t1 and using the average as a best estimate of a system power imbalance; if a sudden change of voltage is detected at time instant t2, determining the average value of sPMUt between t1-? and t2 and using the average as a best estimate of the system power imbalance; and adjusting a power reference of the DG units based on the best estimated system power imbalance.

Abstract: A process for forming a metal damascene structure. First, a cap layer is formed on a first metal layer, and a dielectric layer is formed on the cap layer. Next, the dielectric layer is etched to form a damascene opening. Next, hydrogen-containing plasma, nitrogen-containing plasma, oxygen-containing plasma, or a mixture thereof is used to perform the plasma treatment. Next, a metal is filled in the damascene opening to form a second metal layer. Peeling of the dielectric layer due to remaining impurities is eliminated by the plasma treatment after etching of the damascene opening.