Abstract: Aspects relate to a miniaturized gas cell that may be implemented into an integrated device for gas analysis. The miniaturized gas cell may be a multi-pass gas cell or a hollow waveguide gas cell. In some aspects, the miniaturized gas cell may include a bottom surface and sidewalls formed in a substrate (e.g., a silicon substrate or silicon on insulator (SOI) substrate). The gas cell further includes at least one gas inlet and at least one gas outlet coupled for injection of a gas into and out of the gas cell, respectively. In addition, the gas cell further includes an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively. In addition, a capping layer may be bonded to the substrate to form a top surface of the gas cell.

Abstract: A micromachined interferometer is achieved using a half plane beam splitter. The beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two interfering beams, each propagating in a different medium. A fixed mirror embedded in one of the mediums reflects one of the interfering beams back towards the half plane beam splitter through such medium, while a moveable mirror, which is controlled by an actuator, reflects the other interfering beam back towards said half plane beam splitter through the other medium. A detection plane detects an interference pattern produced as a result of interference between the reflected interfering beams.

Abstract: A micromachined interferometer is achieved using a half plane beam splitter. The beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two interfering beams, each propagating in a different medium. A fixed mirror embedded in one of the mediums reflects one of the interfering beams back towards the half plane beam splitter through such medium, while a moveable mirror, which is controlled by an actuator, reflects the other interfering beam back towards said half plane beam splitter through the other medium. A detection plane detects an interference pattern produced as a result of interference between the reflected interfering beams.