Abstract: An inspection system and a method for defect detection, the method includes: generating a first beam that includes a near infrared spectral component and a visible light component; directing at least the near infrared spectral component towards a backside of an inspected object, the backside includes first elements made of a substantially transparent to near infrared radiation first material and second elements that are made of a second material arranged to reflect near infrared radiation; directing, towards a sensor, a near infrared spectral component of a second beam generated from the illuminating of the inspected object; wherein the sensor is sensitive to visible light radiation and to near infrared radiation; generating, by the sensor, detection signals that are responsive to the near infrared component of the second beam; and detecting at least one attribute of at least the second elements by processing the detection signals.

Abstract: An inspection system and a method for defect detection, the method includes: generating a first beam that comprises a near infrared spectral component and a visible light component; directing at least the near infrared spectral component of the first beam towards an inspected object; directing, towards a sensor, a near infrared spectral component of a second beam generated from the illuminating of the inspected object; wherein the sensor is sensitive to visual light radiation and to near infrared radiation; generating, by the sensor, detection signals that are responsive to the near infrared component of the second beam; and detecting defects in the inspected object by processing the detection signals.

Abstract: A method for defect detection using transmissive bright field and transmissive dark field illumination, the method includes: determining a relationship between at least one transmissive bright field illuminator (92) characteristic and at least one transmissive dark field illuminator (91) characteristic in response to at least one characteristic of each defect type out of multiple defect types that should be detected during a defect detection session and in response to at least one phenomenon to be ignored of during the defect detection session; setting the at least one transmissive bright field illuminator (92) characteristic and the at least one transmissive dark field illuminator (91) characteristic according to the determination; illuminating an at least partially transparent object by the transmissive dark field illuminator and by the transmissive bright field illuminator; detecting light that passes through the at least partially transparent object to provide detection signals, and processing the detecte

Abstract: A system and method for controlling an angular coverage of a light beam. The method includes: defining a non-uniform angular coverage of a first light beam; altering a first spatial relationship between a first movable transmissive deflector and a first light source in response to the definition; directing a first light beam from the first light source through the first movable transmissive deflector such as to provide a first deflected light beam; and focusing the first deflected beam, by a first optical focusing element, to provide a first focused light bean that is focused onto a first area that is characterized by a location that is substantially indifferent to changes in the first spatial relationship.

Abstract: A method and an inspection system, the inspection system includes a camera comprising multiple pixels having a pixel width; a mechanical stage, for introducing a movement between an inspected object and optics of the inspection system; wherein the inspected object is expected to move a distance that substantially equals the pixel width during a pixel movement period; an illumination module and optics for illuminating inspected portions of the inspected object and for directing light from the inspected portions to the camera; and wherein the camera is arranged to acquire multiple acquired images of the inspected portions during each pixel movement period, wherein at least two acquired images partially overlap.

Abstract: An inspection system and a method for defect detection, the method includes: generating a first beam that comprises a near infrared spectral component and a visible light component; directing at least the near infrared spectral component of the first beam towards an inspected object; directing, towards a sensor, a near infrared spectral component of a second beam generated from the illuminating of the inspected object; wherein the sensor is sensitive to visual light radiation and to near infrared radiation; generating, by the sensor, detection signals that are responsive to the near infrared component of the second beam; and detecting defects in the inspected object by processing the detection signals.

Abstract: A method for defect detection using transmissive bright field and transmissive dark field illumination, the method includes: determining a relationship between at least one transmissive bright field illuminator (92) characteristic and at least one transmissive dark field illuminator (91) characteristic in response to at least one characteristic of each defect type out of multiple defect types that should be detected during a defect detection session and in response to at least one phenomenon to be ignored of during the defect detection session; setting the at least one transmissive bright field illuminator (92) characteristic and the at least one transmissive dark field illuminator (91) characteristic according to the determination; illuminating an at least partially transparent object by the transmissive dark field illuminator and by the transmissive bright field illuminator; detecting light that passes through the at least partially transparent object to provide detection signals, and processing the detecte