Abstract: Disclosed are a tungsten hexafluoride preparation method and apparatus based on photoelectric synergy. A photocatalyst and metal tungsten are sequentially filled in a discharge area of a plasma reactor in a direction of gas entry, and the discharge area of the plasma reactor is irradiated with light at the same time; the background gas generates a large amount of plasma in the discharge area, SF6 undergoes decomposition under the synergistic effect of photocatalysis and plasma, SF6 is decomposed to generate fluorine atoms and low-fluorine sulfides such as SF5 and SF4. The generated fluorine ions, SF5, SF4 and low-fluorine sulfides further react with metal tungsten to generate WF6 specialty gas, which not only realizes the utilization of fluorine resources of SF6, but also replaces highly toxic fluorine gas with non-toxic SF6 exhaust gas in the plasma reactor for reaction, thereby ensuring safe operation and low energy consumption.

Abstract: Disclosed are a tungsten hexafluoride preparation method and apparatus based on photoelectric synergy. A photocatalyst and metal tungsten are sequentially filled in a discharge area of a plasma reactor in a direction of gas entry, and the discharge area of the plasma reactor is irradiated with light at the same time; the background gas generates a large amount of plasma in the discharge area, SF6 undergoes decomposition under the synergistic effect of photocatalysis and plasma, SF6 is decomposed to generate fluorine atoms and low-fluorine sulfides such as SF5 and SF4. The generated fluorine ions, SF5, SF4 and low-fluorine sulfides further react with metal tungsten to generate WF6 specialty gas, which not only realizes the utilization of fluorine resources of SF6, but also replaces highly toxic fluorine gas with non-toxic SF6 exhaust gas in the plasma reactor for reaction, thereby ensuring safe operation and low energy consumption.

Abstract: Disclosed are a device of complex gas mixture detection based on optical-path-adjustable spectrum detection and a method therefor, and the device includes: a light source configured for generating an incident beam and emitting the incident beam into an optical gas cell; the optical gas cell, including a cavity configured for accommodating a gas sample, and a reflection module group configured for reflecting the incident beam and a track arranged in the cavity, where the track is consistent with a light path of the light beam in the cavity; a detector module that is connected with the track in a relatively movable manner and is configured for receiving light beams and obtaining spectral data, where an optical path is changed by moving the detector module relative to the track; and a data acquisition unit that is configured for acquiring the spectral data obtained by the detector module.