Abstract: A Czochralski growth system is described comprising a growth chamber, a feed port, and a feed chamber comprising a container for feedstock and a feeder. The feed port is disposed in at least one side wall of the growth chamber, and the feed chamber is attached to the growth chamber at the feed port. The feeder is insertable into the growth chamber through the feed port and supplies the feedstock into the growth chamber. Preferably this system can be used for producing silicon ingots using a continuous Czochralski method.

Abstract: A doped silicon single crystal having a resistivity variation along a longitudinal and/or radial axis of less than 10% and a method of preparing one or a sequential series of doped silicon crystals is disclosed. The method includes providing a melt material comprising silicon into a continuous Czochralski crystal growth apparatus, delivering a dopant, such as gallium, indium, or aluminum, to the melt material, providing a seed crystal into the melt material when the melt material is in molten form, and growing a doped silicon single crystal by withdrawing the seed crystal from the melt material. Additional melt material is provided to the apparatus during the growing step. A doping model for calculating the amount of dopant to be delivered into the melt material during one or more doping events, methods for delivering the dopant, and vessels and containers used to deliver the dopant are also disclosed.

Abstract: A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring or barrier plate abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled to allow use with a heated processing chamber.

Abstract: A Czochralski growth system comprising a growth chamber, an isolation valve, a feed chamber containing feedstock, and a feeder is described. The isolation valve is disposed in at least one side wall of the growth chamber, and the feed chamber is vacuum sealed to the growth chamber through the isolation valve. The feeder is insertable into the growth chamber through the isolation valve and supplies the feedstock into the growth chamber. Preferably this system can be used for producing silicon ingots using a continuous Czochralski method.

Abstract: A doped silicon single crystal having a resistivity variation along a longitudinal and/or radial axis of less than 10% and a method of preparing one or a sequential series of doped silicon crystals is disclosed. The method includes providing a melt material comprising silicon into a continuous Czochralski crystal growth apparatus, delivering a dopant, such as gallium, indium, or aluminum, to the melt material, providing a seed crystal into the melt material when the melt material is in molten form, and growing a doped silicon single crystal by withdrawing the seed crystal from the melt material. Additional melt material is provided to the apparatus during the growing step. A doping model for calculating the amount of dopant to be delivered into the melt material during one or more doping events, methods for delivering the dopant, and vessels and containers used to deliver the dopant are also disclosed.

Abstract: A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve plate is advantageously water cooled to allow use with a heated processing chamber.

Abstract: A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring or barrier plate abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled to allow use with a heated processing chamber.

Abstract: A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring or barrier plate abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled to allow use with a heated processing chamber.

Abstract: A granular semiconductor material transport system capable of continuous, non-contaminating transfer of granular semiconductor material from a large source vessel to a smaller and more manageable target vessel. Movement of the granular material is induced by flowing transfer fluid. The system includes a source vessel, a feed tube, a process vessel, a target vessel and a vacuum source, or mover. The source vessel contains a bulk supply of granular material to be transported. A feed tube received within the source vessel transfers the granular material entrained in a transfer fluid from the source vessel to the process vessel. The process vessel separates the granular material from any dust particles and deposits the granular material in the more manageable target vessel. The vacuum source sealably connects to the process vessel to evacuate the process vessel to set the granular polysilicon in motion within the system.

Abstract: A granular semiconductor material transport system capable of continuous, non-contaminating transfer of granular semiconductor material from a large source vessel to a smaller and more manageable target vessel. Movement of the granular material is induced by flowing transfer fluid. The system includes a source vessel, a feed tube, a process vessel, a target vessel and a vacuum source, or mover. The source vessel contains a bulk supply of granular material to be transported. A feed tube received within the source vessel transfers the granular material entrained in a transfer fluid from the source vessel to the process vessel. The process vessel separates the granular material from any dust particles and deposits the granular material in the more manageable target vessel. The vacuum source sealably connects to the process vessel to evacuate the process vessel to set the granular polysilicon in motion within the system.

Abstract: An apparatus for pulling a monocrystalline ingot from a semiconductor source material located within a growth chamber as the ingot is grown on a seed crystal according to the Czochralski method. The apparatus comprises a drum, a chuck constructed for holding the seed crystal and the ingot, and a cable having a first end connected to the drum, a second end connected to the chuck and a portion wound around the drum. The portion of the cable wound around the drum exerts a normal force on a circumferential surface of the drum corresponding to the tension in the cable. The drum and cable interact to produce a friction force resisting sliding movement of the cable relative to the drum in a direction lengthwise of the cable. The drum is capable of unwinding cable from the drum thereby to let out the cable and lower the chuck, and capable of winding the cable around the drum thereby to reel in the cable and draw the chuck upwardly.

Abstract: A solid material delivery system for a furnace which melts the solid material has a delivery tube located at least partially within the furnace which is mounted by a rotor assembly for selective radial positioning in the furnace over a crucible in the furnace. The rotor assembly is constructed to compensate for thermal expansion and contraction caused by the furnace so that free movement of the delivery tube is achieved at all operating temperatures. The rotor assembly is also constructed to prevent jamming caused by particulate solid material in the rotor assembly. The delivery tube is formed so that flowable solid material will flow in a controlled fashion but without clogging to an outlet. The delivery tube and outlet are shaped to drop the material in a substantially columnar stream into the crucible.

Abstract: A method of laterally adjusting the position of a pull wire of a crystal pulling machine to dampen pendular motion of the pull wire during production of a monocrystal comprises: placing a close-fitting guide around the pull wire; rotating the pulling chamber about the axis Z.sub.1 to rotate both the pull wire and the monocrystal supported by the pull wire; sensing the lateral position of a portion of the pull wire; adjusting the lateral position of the guide in response to the sensed position of the pull wire to dampen pendular motion of the pull wire during production of a monocrystal.

Abstract: In conveying lightweight articles such as containers and the like along a tubular passage, improved apparatus is provided comprising a brush-like guide in the passage for scratchless article support during conveying. The process improvement involves cushionably supporting articles formed of an abrasion-sensitive material on the brush-like surface during conveying to substantially avoid surface scuffing.