Patents by Inventor Diego Feijoo

Diego Feijoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070259530
    Abstract: A layer structure comprising a smoothed interlayer and an overlying layer applied on the interlayer, wherein the interlayer is treated with a gaseous etchant containing hydrogen fluoride, a material removal being obtained thereby and the interlayer being smoothed.
    Type: Application
    Filed: May 3, 2007
    Publication date: November 8, 2007
    Applicant: SILTRONIC AG
    Inventors: Diego Feijoo, Gunter Schwab, Thomas Buschhardt