Patents by Inventor DIEM THY N. TRAN

DIEM THY N. TRAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11805645
    Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: October 31, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Nicholas R. Tapias, Andrew Li, Adam W. Saxler, Kunal Shrotri, Erik R. Byers, Matthew J. King, Diem Thy N. Tran, Wei Yeeng Ng, Anish A. Khandekar
  • Patent number: 11094697
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: August 17, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 11011523
    Abstract: Methods, apparatuses, and systems related to forming a capacitor column using a sacrificial material are described. An example method includes patterning a surface of a semiconductor substrate having: a first silicate material over the substrate, a first nitride material over the first silicate material, a sacrificial material over the first nitride material, a second silicate material over the sacrificial material, and a second nitride material over the second silicate material. The method further includes forming a column of capacitor material in an opening through the first silicate material, the first nitride material, the sacrificial material, the second silicate material, and the second nitride material. The method further includes removing the sacrificial material.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: May 18, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Devesh Dadhich Shreeram, Diem Thy N. Tran, Sanjeev Sapra
  • Patent number: 11004494
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: May 11, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Patent number: 10978553
    Abstract: Methods, apparatuses, and systems related to forming a capacitor using a hard mask material are described. An example method includes patterning a surface to have a first silicate material, a first nitride material on the first silicate material, a second silicate material on the first nitride material, a second nitride material on the second silicate material, and a sacrificial material on the second nitride material. The method further includes forming a hard mask material on the sacrificial material. The method further includes forming a capacitor material in an opening through the first silicate material, the first nitride material, the second silicate material, the second nitride material, the sacrificial material, and the hard mask material. The method further includes removing the sacrificial material and the hard mask material.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: April 13, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Diem Thy N. Tran, Devesh Dadhich Shreeram, Sanjeev Sapra
  • Publication number: 20210050364
    Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 16, 2019
    Publication date: February 18, 2021
    Applicant: Micro Technology, Inc.
    Inventors: Nicholas R. Tapias, Andrew Li, Adam W. Saxler, Kunal Shrotri, Erik R. Byers, Matthew J. King, Diem Thy N. Tran, Wei Yeeng Ng, Anish A. Khandekar
  • Patent number: 10854611
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: December 1, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10847516
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: November 24, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20200243536
    Abstract: Methods, apparatuses, and systems related to forming a capacitor column using a sacrificial material are described. An example method includes patterning a surface of a semiconductor substrate having: a first silicate material over the substrate, a first nitride material over the first silicate material, a sacrificial material over the first nitride material, a second silicate material over the sacrificial material, and a second nitride material over the second silicate material. The method further includes forming a column of capacitor material in an opening through the first silicate material, the first nitride material, the sacrificial material, the second silicate material, and the second nitride material. The method further includes removing the sacrificial material.
    Type: Application
    Filed: January 28, 2019
    Publication date: July 30, 2020
    Inventors: Devesh Dadhich Shreeram, Diem Thy N. Tran, Sanjeev Sapra
  • Publication number: 20200243640
    Abstract: Methods, apparatuses, and systems related to forming a capacitor using a hard mask material are described. An example method includes patterning a surface to have a first silicate material, a first nitride material on the first silicate material, a second silicate material on the first nitride material, a second nitride material on the second silicate material, and a sacrificial material on the second nitride material. The method further includes forming a hard mask material on the sacrificial material. The method further includes forming a capacitor material in an opening through the first silicate material, the first nitride material, the second silicate material, the second nitride material, the sacrificial material, and the hard mask material. The method further includes removing the sacrificial material and the hard mask material.
    Type: Application
    Filed: January 28, 2019
    Publication date: July 30, 2020
    Inventors: Diem Thy N. Tran, Devesh Dadhich Shreeram, Sanjeev Sapra
  • Patent number: 10553703
    Abstract: A method used in forming an array of elevationally-extending transistors comprises forming spaced lower conductive lines over a substrate. A gate insulator is formed in openings that are individually directly above individual of the lower conductive lines. The openings are formed into laterally-spaced lines comprising sacrificial material and are spaced longitudinally there-along. Channel material is formed in the individual openings laterally adjacent the gate insulator and is electrically coupled to the individual lower conductive line there-below. The sacrificial material is replaced with conductive-gate material. Other methods are disclosed including arrays of elevationally-extending transistors independent of method of manufacture.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: February 4, 2020
    Assignee: Micron Technology, Inc.
    Inventors: Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20190326292
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Application
    Filed: July 2, 2019
    Publication date: October 24, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20190267379
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Application
    Filed: May 15, 2019
    Publication date: August 29, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10361204
    Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: July 23, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Raghunath Singanamalla, Fawad Ahmed, Kris K. Brown, Vinay Nair, Gloria Yang, Fatma Arzum Slmsek-Ege, Diem Thy N. Tran
  • Patent number: 10319724
    Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: June 11, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Suraj J. Mathew, Kris K. Brown, Raghunath Singanamalla, Vinay Nair, Fawad Ahmed, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Publication number: 20190172517
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Application
    Filed: February 4, 2019
    Publication date: June 6, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Patent number: 10242726
    Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: March 26, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Sanh D. Tang, Kuo-Chen Wang, Martin C. Roberts, Diem Thy N. Tran, Hideki Gomi, Fredrick D. Fishburn, Srinivas Pulugurtha, Michel Koopmans, Eiji Hasunuma
  • Publication number: 20190088652
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Application
    Filed: November 7, 2018
    Publication date: March 21, 2019
    Applicant: Micron Technology, Inc.
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran
  • Patent number: 10163655
    Abstract: Apparatuses and methods are disclosed herein for densification of through substrate insulating liners. An example method may include forming a through substrate via through at least a portion of a substrate, forming a first liner layer in the through substrate via, and densifying the first liner layer. The example method may further include forming a second liner layer on the first liner layer, and densifying the second liner layer.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: December 25, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Jin Lu, Rita J. Klein, Diem Thy N. Tran, Irina V. Vasilyeva, Zhiqiang Xie
  • Patent number: 10157926
    Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: December 18, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Gloria Yang, Suraj J. Mathew, Raghunath Singanamalla, Vinay Nair, Scott J. Derner, Michael Amiel Shore, Brent Keeth, Fatma Arzum Simsek-Ege, Diem Thy N. Tran