Abstract: An apparatus and a method for laser beam shaping and scanning. The apparatus includes a digital micromirror device (DMD) including a plurality of micromirrors, configured to receive a first laser beam, adjust an axial position of a focal point of the first laser beam along a moving direction of the first laser beam by controlling a focal length of wavefront of a binary hologram applied to the DMD, and adjust a lateral position of the focal point on a plane perpendicular to the moving direction by controlling a tilted angle of a fringe pattern and a period of fringes of the binary hologram applied to the DMD, wherein the DMD simultaneously functions as programmable binary mask and a blazed grating.

Abstract: A laser fabrication method and a laser fabrication system. The laser fabrication system includes an ultrafast laser source configured to output a laser beam; and a digital micromirror device (DMD), configured to receive, shape, and scan the laser beam, wherein more than one binary holograms are synthesized to form a scanning hologram applied to the DMD. The shaped laser beam, containing one or multiple focal points, leaving the DMD, are focused to the sample for fast laser fabrication.

Abstract: An apparatus and a method for laser beam shaping and scanning. The apparatus includes a digital micromirror device (DMD) including a plurality of micromirrors, configured to receive a first laser beam, adjust an axial position of a focal point of the first laser beam along a moving direction of the first laser beam by controlling a focal length of wavefront of a binary hologram applied to the DMD, and adjust a lateral position of the focal point on a plane perpendicular to the moving direction by controlling a tilted angle of a fringe pattern and a period of fringes of the binary hologram applied to the DMD, wherein the DMD simultaneously functions as programmable binary mask and a blazed grating.

Abstract: A laser fabrication method and a laser fabrication system. The laser fabrication system includes an ultrafast laser source configured to output a laser beam; and a digital micromirror device (DMD), configured to receive, shape, and scan the laser beam, wherein more than one binary holograms are synthesized to form a scanning hologram applied to the DMD. The shaped laser beam, containing one or multiple focal points, leaving the DMD, are focused to the sample for fast laser fabrication.

Abstract: The present invention discloses methods and systems for fabricating a 3D metal structure. The method may comprises: forming one or more layers successively on a substrate, each of the layers comprising a structural material or a sacrificial material; laser machining, by a pulsed laser, each of the formed layers based on a photomask corresponding to the structure to be fabricated; and removing redundant materials from the formed layers to release the fabricated three-dimensional metal structure. The system and method for fabricating a 3D metal structure provided in the present application can fabricate a metal structure at nanometer level resolution with high throughout.