Patents by Inventor Dieter Bimberg

Dieter Bimberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11936163
    Abstract: A method of fabricating a radiation emitter including fabricating a layer stack that includes a first reflector, at least one intermediate layer, an active region and a second reflector; locally oxidizing the intermediate layer and thereby forming at least one unoxidized aperture; and locally removing the layer stack, and thereby forming a mesa that includes the first reflector, the unoxidized aperture, the active region, and the second reflector. Before or after locally removing the layer stack and forming the mesa: forming at least a first unoxidized aperture and at least a second unoxidized aperture inside the intermediate layer; etching a trench inside the layer stack, the trench defining a first portion and a second portion of the mesa, wherein the trench severs the intermediate layer(s) so that the first aperture is located in the first portion and the second aperture is located in the second portion of the mesa.
    Type: Grant
    Filed: February 8, 2021
    Date of Patent: March 19, 2024
    Assignee: Changchun Institute of Optics, Fine Mechanics and Physics
    Inventors: Gunter Larisch, Sicong Tian, Dieter Bimberg
  • Publication number: 20220263291
    Abstract: An exemplary embodiment of the present invention relates to a method of fabricating at least one radiation emitter comprising the steps of depositing an etch stop layer on a top side of a substrate; depositing a layer stack on the etch stop layer, said layer stack comprising a first contact layer, a first reflector, an active region, a second reflector, and a second contact layer; locally removing the layer stack and the etch stop layer, and thereby forming at least one mesa, said at least one mesa comprising an unremoved section of the etch stop layer and a layered pillar which forms a vertical cavity laser structure based on the unremoved layer stack inside the at least one mesa; depositing a protection material on the top side of the substrate and thereby embedding the entire mesa in the protection material wherein the backside of the substrate remains unprotected; removing the substrate by applying at least one etching chemical that is capable of etching the substrate but incapable or less capable of etch
    Type: Application
    Filed: May 14, 2020
    Publication date: August 18, 2022
    Applicant: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
    Inventors: Dieter BIMBERG, Gunter LARISCH
  • Publication number: 20220059991
    Abstract: An exemplary embodiment of the invention relates to a method of fabricating a radiation emitter (100) comprising the steps of fabricating a layer stack (10) that comprises a first reflector (12), an active region (13), an oxidizable layer (21-24), and a second reflector (14); and locally removing the layer stack (10), and thereby forming a mesa (M) of the radiation emitter (100), wherein said mesa (M) comprises the first reflector (12), the active region (13), the oxidizable layer (21-24) and the second reflector (14), wherein before or after locally removing the layer stack (10) and forming said mesa (M) the following steps are carried out: vertically etching blind holes (30) inside the layer stack (10), wherein the blind holes (30) vertically extend at least to the oxidizable layer (21-24) and expose the oxidizable layer (21-24); and oxidizing the oxidizable layer (21-24) via the sidewalls (31) of the blind holes (30) in lateral direction, wherein from each hole an oxidation front (32) radially moves outwar
    Type: Application
    Filed: May 21, 2021
    Publication date: February 24, 2022
    Applicant: Changchun Institute of Optics, Fine Mechanics and Physics
    Inventors: Gunter LARISCH, Sicong TIAN, Dieter BIMBERG
  • Publication number: 20220059997
    Abstract: A method of fabricating at least one radiation emitter including fabricating a layer stack that includes a first reflector, an active region, an oxidizable layer, and a second reflector; and locally removing the layer stack, and thereby forming at least one mesa. The mesa includes the first reflector, the active region, the oxidizable layer and the second reflector. Before or after locally removing the layer stack and forming the mesa the following steps are carried out: vertically etching at least three blind holes inside the layer stack, wherein the blind holes vertically extend to and expose the oxidizable layer; and oxidizing the oxidizable layer via the sidewalls of the blind holes in lateral direction. An oxidation front radially moves outwards from each hole. The etching is terminated before the entire oxidizable layer is oxidized, thereby forming at least one unoxidized aperture that is limited by at least three oxidation fronts.
    Type: Application
    Filed: February 8, 2021
    Publication date: February 24, 2022
    Applicant: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
    Inventors: Gunter LARISCH, Sicong TIAN, Dieter BIMBERG
  • Publication number: 20220059990
    Abstract: A method of fabricating a radiation emitter including fabricating a layer stack that includes a first reflector, at least one intermediate layer, an active region and a second reflector; locally oxidizing the intermediate layer and thereby forming at least one unoxidized aperture; and locally removing the layer stack, and thereby forming a mesa that includes the first reflector, the unoxidized aperture, the active region, and the second reflector. Before or after locally removing the layer stack and forming the mesa: forming at least a first unoxidized aperture and at least a second unoxidized aperture inside the intermediate layer; etching a trench inside the layer stack, the trench defining a first portion and a second portion of the mesa, wherein the trench severs the intermediate layer(s) so that the first aperture is located in the first portion and the second aperture is located in the second portion of the mesa.
    Type: Application
    Filed: February 8, 2021
    Publication date: February 24, 2022
    Applicant: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
    Inventors: Gunter LARISCH, Sicong TIAN, Dieter BIMBERG
  • Patent number: 9979158
    Abstract: A vertical cavity surface emitting laser comprising a first reflector, a second reflector comprising a layer stack of semiconductor or isolating layers, an active region arranged between the first and second reflectors, and an additional layer on top of the layer stack at the light output side, said additional layer forming an output interface of the laser, wherein the refractive index of the additional layer is smaller, equal to or larger than the smallest refractive index of the refractive indices of said layer stack.
    Type: Grant
    Filed: January 12, 2017
    Date of Patent: May 22, 2018
    Assignee: Technische Universitaet Berlin
    Inventors: Dieter Bimberg, Gunter Larisch, James A. Lott
  • Patent number: 9780525
    Abstract: An optoelectronic oscillator for generating an optical and/or electric pulse comb, comprising a monolithically integrated passively mode-coupled semiconductor laser and an optical feedback loop which guides a part of the optical radiation of the semiconductor laser and feeds said part back into the semiconductor laser as feedback pulses. Without the influence of the feedback pulses, the semiconductor laser would emit comb-like optical pulses, hereafter referred to as primary pulses, and in the event of an influence, emits comb-like output pulses which have been influenced by the feedback pulses, said output pulses having a lower temporal jitter or less phase noise than the primary pulses. The feedback loop is damped between 27.5 and 37.5 dB, and the time lag of the feedback loop is selected such that each feedback pulse is incident within the temporal half-value width of each subsequent primary pulse.
    Type: Grant
    Filed: June 12, 2014
    Date of Patent: October 3, 2017
    Assignee: Technische Universität Berlin
    Inventors: Dejan Arsenijevic, Moritz Kleinert, Dieter Bimberg, I
  • Patent number: 9705285
    Abstract: Device comprising a high brightness broad-area edge-emitting semiconductor laser and method of making the same. The device includes an edge-emitting semiconductor laser, said laser having a multi-layered waveguide, and said waveguide comprising at least one layer with an active region that emits light under electrical injection, and at least one aperiodic layer stack.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: July 11, 2017
    Assignee: Technische Universität Berlin
    Inventors: Vladimir Kalosha, Dieter Bimberg
  • Patent number: 9693715
    Abstract: An optical sensor for detecting chemical, biochemical or biological substances includes a laser and a semiconductor chip. The sensor includes at least one photodetector and at least one high-contrast grating that are monolithically integrated in the semiconductor chip. The high-contrast grating is configured to optically couple radiation emitted by the laser into the photodetector. The coupling behavior of the high-contrast grating depends on the optical properties of external substances that are brought near to or in contact with the high-contrast grating.
    Type: Grant
    Filed: December 3, 2014
    Date of Patent: July 4, 2017
    Assignee: Technische Universität Berlin
    Inventors: Anjin Liu, Werner Hofmann, Dieter Bimberg
  • Patent number: 9543731
    Abstract: An embodiment of the invention relates to a method for generating short optical pulses comprising the steps of: operating a single section semiconductor laser in a nonlinear regime to emit chirped optical pulses at an output facet of the laser cavity, and compressing the chirped optical pulses outside the laser cavity using a dispersive element in order to generate the short optical pulses.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: January 10, 2017
    Assignee: Technische Universität Berlin
    Inventors: Ricardo Rosales, Dieter Bimberg
  • Publication number: 20160276794
    Abstract: An embodiment of the invention relates to a method for generating short optical pulses comprising the steps of: operating a single section semiconductor laser in a nonlinear regime to emit chirped optical pulses at an output facet of the laser cavity, and compressing the chirped optical pulses outside the laser cavity using a dispersive element in order to generate the short optical pulses.
    Type: Application
    Filed: March 17, 2015
    Publication date: September 22, 2016
    Applicant: Technische Universitaet Berlin
    Inventors: Ricardo ROSALES, Dieter BIMBERG
  • Patent number: 9424925
    Abstract: The invention relates, inter alia, to a memory cell (10) comprising at least one binary memory area for storing bit information. According to the invention it is provided that the memory area (SB) can optionally store holes or electrons and allows a recombination of holes and electrons, the charge carrier type of the charge carriers stored in the memory area defines the bit information of the memory area, and a charge carrier injection device (PN) is present, by means of which optionally holes or electrons can be injected into the memory area (SB) and the bit information can thus be changed.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: August 23, 2016
    Assignee: Technische Universität Berlin
    Inventors: Andreas Marent, Dieter Bimberg
  • Publication number: 20160161331
    Abstract: An embodiment of the invention relates to an optical sensor for detecting chemical, biochemical or biological substances, the sensor comprising a laser and a semiconductor chip, wherein at least one photodetector and at least one high-contrast grating are monolithically integrated in said same chip, wherein the high-contrast grating is configured to optically couple radiation emitted by the laser into the photodetector, and wherein the coupling behaviour of said high-contrast grating depends on the optical properties of external substances that are brought near to or in contact with the high-contrast grating.
    Type: Application
    Filed: December 3, 2014
    Publication date: June 9, 2016
    Applicant: TECHNISCHE UNIVERSITAT BERLIN
    Inventors: Anjin LIU, Werner HOFMANN, Dieter BIMBERG
  • Publication number: 20160149377
    Abstract: An optoelectronic oscillator for generating an optical and/or electric pulse comb, comprising a monolithically integrated passively mode-coupled semiconductor laser and an optical feedback loop which guides a part of the optical radiation of the semiconductor laser and feeds said part back into the semiconductor laser as feedback pulses. Without the influence of the feedback pulses, the semiconductor laser would emit comb-like optical pulses, hereafter referred to as primary pulses, and in the event of an influence, emits comb-like output pulses which have been influenced by the feedback pulses, said output pulses having a lower temporal jitter or less phase noise than the primary pulses. The feedback loop is damped between 27.5 and 37.5 dB, and the time lag of the feedback loop is selected such that each feedback pulse is incident within the temporal half-value width of each subsequent primary pulse.
    Type: Application
    Filed: June 12, 2014
    Publication date: May 26, 2016
    Applicant: Technische Universität Berlin
    Inventors: Dejan ARSENIJEVIC, Moritz KLEINERT, Dieter BIMBERG, I
  • Publication number: 20150310919
    Abstract: The invention relates, inter alia, to a memory cell (10) comprising at least one binary memory area for storing bit information. According to the invention it is provided that the memory area (SB) can optionally store holes or electrons and allows a recombination of holes and electrons, the charge carrier type of the charge carriers stored in the memory area defines the bit information of the memory area, and a charge carrier injection device (PN) is present, by means of which optionally holes or electrons can be injected into the memory area (SB) and the bit information can thus be changed.
    Type: Application
    Filed: March 29, 2012
    Publication date: October 29, 2015
    Inventors: Andreas Marent, Dieter BIMBERG
  • Publication number: 20150288147
    Abstract: Device comprising a high brightness broad-area edge-emitting semiconductor laser and method of making the same. The device includes an edge-emitting semiconductor laser, said laser having a multi-layered waveguide, and said waveguide comprising at least one layer with an active region that emits light under electrical injection, and at least one aperiodic layer stack.
    Type: Application
    Filed: January 31, 2014
    Publication date: October 8, 2015
    Applicant: TECHNISCHE UNIVERSITÄT BERLIN
    Inventors: Vladimir KALOSHA, Dieter BIMBERG
  • Patent number: 8559479
    Abstract: The invention relates to a method for the production of a photon pair source, which generates entangled photon pairs, having at least one quantum dot, wherein in the method the operational behaviour of the photon pair source is determined by adjusting the fine structure splitting of the excitonic energy level of the at least one quantum dot. It is provided according to the invention for the fine structure splitting of the excitonic energy level to be adjusted by depositing the at least one quantum dot on a {111} crystal surface of a semiconductor substrate.
    Type: Grant
    Filed: July 20, 2009
    Date of Patent: October 15, 2013
    Assignee: Technische Universitat Berlin
    Inventors: Momme Winkelnkemper, Andrei Schliwa, Dieter Bimberg
  • Patent number: 8404506
    Abstract: In a method for the production of a single photon source with a given operational performance, the given operational performance for the individual photon source may be fixed by a directed setting of the fine structure gap of the excitonic energy level for at least one quantum dot. The at least one quantum dot is produced with a quantum dot size corresponding to the fine structure gap for setting.
    Type: Grant
    Filed: November 20, 2006
    Date of Patent: March 26, 2013
    Assignee: Technische Universitaet Berlin
    Inventors: Anatol Lochmann, Robert Seguin, Dieter Bimberg, Sven Rodt, Vladimir Gaysler
  • Patent number: 8396091
    Abstract: An embodiment of the invention relates to a device comprising a laser and a waveguide stripe or netlike hexagonal stripe structure, which allows propagation of multitude of the lateral modes in the waveguide stripe or stripe structure, wherein the waveguide stripe has at least one corrugated edge section along its longitudinal axis to provide preferable amplification of the fundamental lateral mode or in-phase supermode and to obtain high brightness of the emitted radiation.
    Type: Grant
    Filed: January 31, 2011
    Date of Patent: March 12, 2013
    Assignee: Technische Universitat Berlin
    Inventors: Vladimir Kalosha, Kristijan Posilovic, Dieter Bimberg
  • Patent number: 8331142
    Abstract: An embodiment of the invention relates to a memory comprising a strained double-heterostructure having an inner semiconductor layer which is sandwiched between two outer semiconductor layers, wherein the lattice constant of the inner semiconductor layer differs from the lattice constants of the outer semiconductor layers, the resulting lattice strain in the double-heterostructure inducing the formation of at least one quantum dot inside the inner semiconductor layer, said at least one quantum dot being capable of storing charge carriers therein, and wherein, due to the lattice strain, the at least one quantum dot has an emission barrier of 1.15 eV or higher, and provides an energy state density of at least three energy states per 1000 nm3, all said at least three energy states being located in an energy band of 50 meV or less.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: December 11, 2012
    Assignee: Technische Universitat Berlin
    Inventors: Dieter Bimberg, Martin Geller, Andreas Marent, Tobias Nowozin