Patents by Inventor Dieter Frerking

Dieter Frerking has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10845523
    Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.
    Type: Grant
    Filed: July 17, 2018
    Date of Patent: November 24, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Ekkehard Brune, Dieter Frerking, Thomas Thöniß, Claus Spruch
  • Publication number: 20180341053
    Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.
    Type: Application
    Filed: July 17, 2018
    Publication date: November 29, 2018
    Applicant: ASML Netherlands B. V.
    Inventors: Ekkehard BRUNE, Dieter Frerking, Thomas Thönlß, Claus Spruch
  • Patent number: 10078167
    Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.
    Type: Grant
    Filed: September 19, 2014
    Date of Patent: September 18, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Ekkehard Brune, Dieter Frerking, Thomas Thöniß, Claus Spruch
  • Patent number: 9678262
    Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. An optical system for imaging the plasma onto the end of the optical fiber, which faces the optical system, is arranged between the chamber and the transferring optical fiber, wherein the optical system is corrected for reducing the chromatic aberration.
    Type: Grant
    Filed: September 19, 2014
    Date of Patent: June 13, 2017
    Assignee: Qloptiq Photonics GmbH & Co. KG
    Inventors: Björn Görtz, Dieter Frerking, Thomas Thöniβ, Claus Spruch
  • Publication number: 20150083937
    Abstract: A laser-operated light source encompasses a chamber for accommodating a gaseous medium for generating a plasma, which emits radiation in response to the operation of the light source under the impact of the laser radiation. The light source encompasses a housing for accommodating the chamber. The invention provides for optical filter means, which are assigned to the housing and/or which are arranged downstream from the housing in the light path of emitted radiation. The optical filter means serve to spectrally filter the radiation emitted by the plasma in response to the operation of the light source.
    Type: Application
    Filed: September 19, 2014
    Publication date: March 26, 2015
    Inventors: Martin Bischoff, Tobias Nowitzki, Thomas Thöniß, Dieter Frerking, Claus Spruch
  • Publication number: 20150085517
    Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. An optical system for imaging the plasma onto the end of the optical fiber, which faces the optical system, is arranged between the chamber and the transferring optical fiber, wherein the optical system is corrected for reducing the chromatic aberration.
    Type: Application
    Filed: September 19, 2014
    Publication date: March 26, 2015
    Inventors: Björn Görtz, Dieter Frerking, Thomas Thöniss, Claus Spruch
  • Publication number: 20150085516
    Abstract: A laser-operated light source encompasses a chamber for accommodating an ionizable gas and an ignition source for ionizing the gas in the chamber for generating a plasma. The light source furthermore encompasses a laser for inputting laser energy into the plasma such that, under the impact of the laser radiation, the plasma emits useful light, which forms the output signal of the light source, wherein provision is made for means for coupling the useful light into a transferring optical fiber. In the case of the light source according to the invention, at least one mode scrambler is assigned to the optical fiber or the optical fibers.
    Type: Application
    Filed: September 19, 2014
    Publication date: March 26, 2015
    Inventors: Ekkehard Brune, Dieter Frerking, Thomas Thöniß, Claus Spruch