Patents by Inventor Dieter Panknin

Dieter Panknin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing a microelectronic semiconductor component
    Patent number: 6383902
    Abstract: The invention relates to a method for producing a microelectronic semiconductor component, especially made of silicon carbide. According to said method doped areas are produced in the semiconductor by ion implantation and radiation damage in the semiconductor is then eliminated by irradiation with electromagnetic rays. The semiconductor is exposed across substantially its entire surface to pulse-like optical radiation and heated at least in the doped area.
    Type: Grant
    Filed: March 13, 2000
    Date of Patent: May 7, 2002
    Assignee: DaimlerChrysler AG
    Inventors: Ekkehard Niemann, Dieter Panknin, Wolfgang Skorupa, Hans Wirth