Patents by Inventor Dieter Spickenreuther

Dieter Spickenreuther has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the etching of silicon substrates and substrate for the execution of the method
    Patent number: 4343875
    Abstract: A method of etching a silicon-substrate, wherein a protective layer is formed on the substrate and serves as an etching mask, at least one some areas of the surface of the substrate. A layer of mineral glass, adhering to the substrate, is used for this protective coating. The protective layer can be formed by the application of a mixture containing finely dispersed mineral glass and fixing agents, or a composition which will form mineral glass when heated, to the Si-substrate, by heating the mixture to form a layer of mineral glass adhering to the Si-substrate. If photo-polymerizable components are used in this mixture, the etching mask of glass may be produced by way of photolithography. The invention further includes a Si-substrate provided with a mineral glass protective layer.
    Type: Grant
    Filed: June 20, 1980
    Date of Patent: August 10, 1982
    Assignee: BBC Brown, Boveri & Company, Limited
    Inventor: Dieter Spickenreuther