Abstract: A scanning transmission electron microscope including an evacuated housing and a phase contrast device in which the imaging ray cone of the microscope generates a hologram having zones of positive or negative interference. The microscope includes means for separately detecting and measuring the intensities of the zones of positive or negative interference and a picture display means coupled to and controlled by the detecting means for monitoring the intensities detected and measured.The improvement of the invention comprises an improved detecting means including an image converter disposed in the electron beam path of the microscope on which the hologram is projected for converting the hologram into an optical image. Planar image masks are disposed outside of the microscope housing and have transparent and opaque areas which correspond to the zones of positive and negative interference of the hologram.

Abstract: A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.