Patents by Inventor Dietmar Kirsten

Dietmar Kirsten has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching agent for III/V semiconductors
    Patent number: 4100014
    Abstract: An etching agent for III/V semiconductor material consisting of(a) 1 to 30 percent by weight of hydrofluoric acid,(b) 2 to 30 percent by weight of hydrogen peroxide,(c) 1 to 75 percent by weight of sulfuric acid,(d) 15 to 95 percent by weight of water,Wherein the quantities by weight of the individual components are so chosen that they will add up to 100 percent by weight.
    Type: Grant
    Filed: April 6, 1977
    Date of Patent: July 11, 1978
    Assignee: Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
    Inventors: Franz Kuhn-Kuhnenfeld, Dietmar Kirsten, Marianne Maier