Patents by Inventor Dimitry Pokras

Dimitry Pokras has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Haze mask system for haze suppression
    Patent number: 10522426
    Abstract: This system and method minimize an effect of haze to signal-to-noise ratio and compensate for haze on the haze map. A first mask with a first aperture is disposed along the path of the light beam between a light source and a collector. A first actuator moves the first mask along a tangential direction. A second mask with a second aperture is disposed along the path of the light beam between the first mask and the collector. A second actuator moves the second mask along a radial direction perpendicular to the tangential direction. The first mask and the second mask are independently movable along the tangential direction and the radial direction using the first actuator and the second actuator.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: December 31, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Hongxing Yuan, Dimitry Pokras, William VanHoomissen, Douglas Chan