Patents by Inventor Dimitry Shur

Dimitry Shur has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for measuring overlay errors
    Patent number: 7842933
    Abstract: A system and method for detecting overlay errors, the method includes (i) directing a primary electron beam to interact with an inspected object; whereas the inspected object comprises a first feature formed on a first layer of the inspected object and a second feature formed on a second layer of the object, wherein the second feature is buried under the first layer and wherein the second feature affects a shape of an area of the first layer; (ii) detecting electrons reflected or scattered from the area of the first layer; and (iii) receiving detection signals from at least one detector and determining overlay errors.
    Type: Grant
    Filed: October 22, 2003
    Date of Patent: November 30, 2010
    Assignee: Applied Materials Israel, Ltd.
    Inventors: Dimitry Shur, Alexander Kadyshevitch
  • System and method for measuring overlay errors
    Publication number: 20050089773
    Abstract: A system and method for detecting overlay errors, the method includes (i) directing a primary electron beam to interact with an inspected object; whereas the inspected object comprises a first feature formed on a first layer of the inspected object and a second feature formed on a second layer of the object, wherein the second feature is buried under the first layer and wherein the second feature affects a shape of an area of the first layer; (ii) detecting electrons reflected or scattered from the area of the first layer; and (iii) receiving detection signals from at least one detector and determining overlay errors.
    Type: Application
    Filed: October 22, 2003
    Publication date: April 28, 2005
    Inventors: Dimitry Shur, Alexander Kadyshevitch