Abstract: An atomic layer deposition system for depositing thin layers of material onto a common substrate includes a deposition head shaped to define a conical interior cavity into which a conical deposition drum is disposed. Together, the deposition head and the deposition drum define a narrow gap adapted to receive the common substrate, the spacing of the narrow gap being adjustable through acute axial displacement of the deposition head relative to the deposition drum. A pair of rollers advances the substrate through the gap in a first direction, as the deposition head rotates in the opposite direction at a precise rate. Each of the deposition head and deposition drum includes a plurality of separate fluid channels which enable gasses utilized in the deposition process to be delivered into and exhausted from the narrow gap, with the delivery of inert gas on both sides of the substrate effectively creating an air bearing.

Abstract: An atomic layer deposition system for depositing thin layers of material onto a common substrate includes a deposition head shaped to define a conical interior cavity into which a conical deposition drum is disposed. Together, the deposition head and the deposition drum define a narrow gap adapted to receive the common substrate, the spacing of the narrow gap being adjustable through acute axial displacement of the deposition head relative to the deposition drum. A pair of rollers advances the substrate through the gap in a first direction, as the deposition head rotates in the opposite direction at a precise rate. Each of the deposition head and deposition drum includes a plurality of separate fluid channels which enable gasses utilized in the deposition process to be delivered into and exhausted from the narrow gap, with the delivery of inert gas on both sides of the substrate effectively creating an air bearing.

Abstract: A system for constructing a roller-type nanoimprint lithography (RNIL) master comprises a master fabrication tool positioned in relation to a metal sleeve which is axially mounted on a rotatable drum. As part of the manufacturing process, the metal sleeve is applied with a layer of photoresist. Then, a laser writing instrument for the master fabrication tool exposes the photoresist in a defined, controller-regulated pattern using highly-focused pulses of light. Using alignment fiducials on the metal sleeve for registration, the laser writing instrument sensitizes the photoresist in a designated pattern as the rotatable drum continuously moves both rotationally and linearly about its longitudinal axis. In connection with one manufacturing process, the photoresist is sensitized at variable depths by modifying the number, duration and intensity of light pulses emitted.

Abstract: A system for maintaining a pollutant controlled workspace includes an airtight enclosure with a front access window. A set of impermeable exterior panels and a set of permeable interior panels are slidably mounted within the access window in a spaced apart relationship. Regulated either through a manual control panel or programmable controller, a fan filter unit treats a supply of source air and delivers the filtered air down into a narrow vertical airflow channel located between the exterior and interior panels. Once a suitable amount of pressure accumulates, the treated air penetrates into the workspace as a horizontal laminar flow. Any particulates present in the workspace are drawn rearward by the laminar flow and are trapped behind a multi-apertured back board. The contaminant air is then drawn from a low pressure return located behind the back board and into the fan filter unit for recirculation within the enclosure.

Abstract: A system for manufacturing a cylindrical, nanoimprint lithography master includes, in one embodiment, a flat master coated with a first layer of compliant photopolymer material, a cylindrical master with an outer sleeve formed from a second layer of compliant photopolymer material, and a light source. The cylindrical master is disposed in tangential contact against the flat master such that the first and second layers of compliant material exhibit 5%-20% compressive strain within the region of contact. Through such pressure, the feature pattern in the flat master is imprinted into the first layer of material. Light from the light source is acutely focused into a narrow curing zone within the contact region. Curing causes the first layer of photopolymer material to bond to the outer sleeve. Through geometric matching and synchronized movement between the flat and cylindrical masters, the cylindrical master can be patterned about its periphery without creating a seam.

Abstract: A system for maintaining a pollutant controlled workspace includes an airtight enclosure with a front access window. A set of impermeable exterior panels and a set of permeable interior panels are slidably mounted within the access window in a spaced apart relationship. Regulated either through a manual control panel or programmable controller, a fan filter unit treats a supply of source air and delivers the filtered air down into a narrow vertical airflow channel located between the exterior and interior panels. Once a suitable amount of pressure accumulates, the treated air penetrates into the workspace as a horizontal laminar flow. Any particulates present in the workspace are drawn rearward by the laminar flow and are trapped behind a multi-apertured back board. The contaminant air is then drawn from a low pressure return located behind the back board and into the fan filter unit for recirculation within the enclosure.

Abstract: A system for producing color transformable light includes a light source designed to emit blue excitation light and a color transformer adapted to selectively absorb and reemit the blue excitation light as green light and/or red light. The color transformer includes a transparent slide that includes a first region embedded with red phosphor, a second region embedded with green phosphor and a third region in the absence of phosphors. An apparatus retains and selectively moves the color transformer relative to the light source, such as through translational or rotational displacement. Accordingly, by displacing the position of each region in color transformer relative to the light source, the amount of blue, green and red in the output light can be adjustably mixed to yield a particular color. An optical component, such as a lens, is situated with the color transformer at its focal point and serves to focus the output light.