Abstract: The invention relates to a vacuum sputter reactor comprising a rotatable vacuum tight coupling. The coupling comprises a first tubular section in the form of a spindle, and a second tubular section in the form of a cylindrical target, axially slidable over the first tubular section to abut against a peripheral outer abutment ring. The coupling further comprising at least one sealing ring located between the outer diameter of the first tubular section and the inner diameter of the second tubular section in a sliding overlapping contact area of the first and second tubular sections. The outer diameter of the first tubular section is generally parallel to the opposing surface of the inner wall of the second tubular section from the sealing ring to the end of the first tubular section.

Abstract: A target assembly is claimed for use in e.g. a magnetron deposition apparatus. The target assembly is characterised in that at least one of the functions—bearing of the tube, rotation of the tube, electrical contact, coolant sealing and vacuum sealing—is integrated into the tube itself. Such an assembly has the advantage that it better uses the vacuum space by reducing the volume incorporated by the end blocks. Due to the compactness of the assembly it can also be used in smaller scale installations where now only planar target assemblies can be used.

Abstract: The present invention provides a planar magnetron including a surface for mounting a planar substantially polygonal target (2) having a substantially central target area for sputtering onto a substrate. The magnetron comprises an array of magnets (4) defining a closed loop magnetic field for generating an elongated plasma race-track above the target (2). Means for establishing cyclical, relative, substantially translational movement between the race-track and the target support surface are provided, the substantially translational movement being substantially parallel to this surface and the trace of the substantially translational movement being a two-dimensional figure. The periphery of the race-track lies substantially within said substantially central target area throughout each cycle, the establishing means being adapted to provide a substantially uniform erosion of the target (2) at least within said substantially central target area.

Abstract: A luggage case comprises a lid shell (11) and a base shell (12) connected together by a hinge (22). The edges of the shells can be fastened together by latches (23, 24, 25). Two latches (23, 24) are mounted on the lid shell at the end walls. When they are released, they project downwardly and outwardly to provide gripping elements for opening the case. The case has two wheels (70, 71) and a steering handle (74) for rolling the case in a two-wheeled mode. Two castors (72, 73) are located on the back wall, and a pulling handle (76) is provided on the front wall. The pulling handle can be used for pulling the case on the wheels and the castors in four-wheeled mode. The carrying handle (21) is fixed to the frame (22) so as not to pivot. It is made of thermoplastic rubber to allow twisting movement for the comfort of the traveller. The latch (25) operates easily under carrying handle (21).