Patents by Inventor Dirk Ehrentraut

Dirk Ehrentraut has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240133076
    Abstract: A gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001) +c-plane and a (000-1) ?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3; an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3; an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and Cl greater than about 1×1016 cm?3; a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Application
    Filed: December 16, 2023
    Publication date: April 25, 2024
    Inventors: Wenkan JIANG, Dirk EHRENTRAUT, Mark P. D'EVELYN
  • Patent number: 11898269
    Abstract: A gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001)+c-plane and a (000-1)?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3, an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3, an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and Cl greater than about 1×1016 cm?3, a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Grant
    Filed: May 6, 2020
    Date of Patent: February 13, 2024
    Assignee: SLT Technologies, Inc.
    Inventors: Wenkan Jiang, Dirk Ehrentraut, Mark P. D'Evelyn
  • Publication number: 20230340695
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Application
    Filed: June 20, 2023
    Publication date: October 26, 2023
    Inventors: Dirk EHRENTRAUT, Mark P. D'EVELYN, Drew W. CARDWELL
  • Publication number: 20230317444
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 5, 2023
    Applicant: SLT Technologies, Inc.
    Inventors: Wenkan JIANG, Mark P. D'EVELYN, Derrick S. KAMBER, Dirk EHRENTRAUT, Jonathan D. COOK, James WENGER
  • Patent number: 11721549
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: August 8, 2023
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Wenkan Jiang, Drew W. Cardwell, Dirk Ehrentraut
  • Patent number: 11705322
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: July 18, 2023
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Wenkan Jiang, Mark P. D'Evelyn, Derrick S. Kamber, Dirk Ehrentraut, Jonathan D. Cook, James Wenger
  • Publication number: 20210249252
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Application
    Filed: May 22, 2020
    Publication date: August 12, 2021
    Inventors: Wenkan JIANG, Mark P. D'EVELYN, Derrick S. KAMBER, Dirk EHRENTRAUT, Jonathan D. COOK, James WENGER
  • Publication number: 20210249266
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Application
    Filed: February 10, 2021
    Publication date: August 12, 2021
    Inventors: Mark P. D'Evelyn, Wenkan Jiang, Drew W. Cardwell, Dirk Ehrentraut
  • Publication number: 20200263321
    Abstract: A gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001) +c-plane and a (000-1) ?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3, an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3, an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and Cl greater than about 1×1016 cm?3, a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Application
    Filed: May 6, 2020
    Publication date: August 20, 2020
    Inventors: Wenkan JIANG, Dirk EHRENTRAUT, Mark P. D'EVELYN
  • Patent number: 10648102
    Abstract: Gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001) +c-plane and a (000-1) ?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3; an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3; an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and CI greater than about 1×1016 cm?3; a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Grant
    Filed: January 9, 2018
    Date of Patent: May 12, 2020
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Wenkan Jiang, Dirk Ehrentraut, Mark P. D'Evelyn
  • Patent number: 10604865
    Abstract: Methods for large-scale manufacturing of semipolar gallium nitride boules are disclosed. The disclosed methods comprise suspending large-area single crystal seed plates in a rack, placing the rack in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and growing crystals ammonothermally. A bi-faceted growth morphology may be maintained to facilitate fabrication of large area semipolar wafers without growing thick boules.
    Type: Grant
    Filed: June 26, 2018
    Date of Patent: March 31, 2020
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Derrick S. Kamber, Bradley C. Downey
  • Patent number: 10301745
    Abstract: An ultralow defect gallium-containing nitride crystal and methods of making ultralow defect gallium-containing nitride crystals are disclosed. The crystals are useful as substrates for light emitting diodes, laser diodes, transistors, photodetectors, solar cells, and photoelectrochemical water splitting for hydrogen generators.
    Type: Grant
    Filed: August 2, 2016
    Date of Patent: May 28, 2019
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Wenkan Jiang, Bradley C. Downey
  • Publication number: 20190003078
    Abstract: Methods for large-scale manufacturing of semipolar gallium nitride boules are disclosed. The disclosed methods comprise suspending large-area single crystal seed plates in a rack, placing the rack in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and growing crystals ammonothermally. A bi-faceted growth morphology may be maintained to facilitate fabrication of large area semipolar wafers without growing thick boules.
    Type: Application
    Filed: June 26, 2018
    Publication date: January 3, 2019
    Inventors: Mark P. D'EVELYN, Dirk EHRENTRAUT, Derrick S. KAMBER, Bradley C. DOWNEY
  • Patent number: 10145026
    Abstract: Methods for large-scale manufacturing of semipolar gallium nitride boules are disclosed. The disclosed methods comprise suspending large-area single crystal seed plates in a rack, placing the rack in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and growing crystals ammonothermally. A bi-faceted growth morphology may be maintained to facilitate fabrication of large area semipolar wafers without growing thick boules.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: December 4, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Derrick S. Kamber, Bradley C. Downey
  • Patent number: 10036099
    Abstract: Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.
    Type: Grant
    Filed: January 16, 2015
    Date of Patent: July 31, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Derrick S. Kamber, Bradley C. Downey
  • Publication number: 20180195206
    Abstract: A gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001) +c-plane and a (000-1) ?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3; an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3; an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and Cl greater than about 1×1016 cm?3; a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Application
    Filed: January 9, 2018
    Publication date: July 12, 2018
    Inventors: Wenkan Jiang, Dirk Ehrentraut, Mark P. D'Evelyn
  • Patent number: 9589792
    Abstract: High quality ammonothermal group III metal nitride crystals having a pattern of locally-approximately-linear arrays of threading dislocations, methods of manufacturing high quality ammonothermal group III metal nitride crystals, and methods of using such crystals are disclosed. The crystals are useful for seed bulk crystal growth and as substrates for light emitting diodes, laser diodes, transistors, photodetectors, solar cells, and for photoelectrochemical water splitting for hydrogen generation devices.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: March 7, 2017
    Assignee: Soraa, Inc.
    Inventors: Wenkan Jiang, Mark P. D'Evelyn, Derrick S. Kamber, Dirk Ehrentraut, Michael Krames
  • Publication number: 20170029978
    Abstract: An ultralow defect gallium-containing nitride crystal and methods of making ultralow defect gallium-containing nitride crystals are disclosed. The crystals are useful as substrates for light emitting diodes, laser diodes, transistors, photodetectors, solar cells, and photoelectrochemical water splitting for hydrogen generators.
    Type: Application
    Filed: August 2, 2016
    Publication date: February 2, 2017
    Inventors: MARK P. D'EVELYN, DIRK EHRENTRAUT, WENKAN JIANG, BRADLEY C. DOWNEY
  • Patent number: 9543392
    Abstract: Large-area, low-cost single crystal transparent gallium-containing nitride crystals useful as substrates for fabricating GaN devices for electronic and/or optoelectronic applications are disclosed. The gallium-containing nitride crystals are formed by controlling impurity concentrations during ammonothermal growth and processing to control the relative concentrations of point defect species.
    Type: Grant
    Filed: September 12, 2014
    Date of Patent: January 10, 2017
    Assignee: Soraa, Inc.
    Inventors: Wenkan Jiang, Dirk Ehrentraut, Mark P. D'Evelyn
  • Patent number: 9404197
    Abstract: An ultralow defect gallium-containing nitride crystal and methods of making ultralow defect gallium-containing nitride crystals are disclosed. The crystals are useful as substrates for light emitting diodes, laser diodes, transistors, photodetectors, solar cells, and photoelectrochemical water splitting for hydrogen generators.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: August 2, 2016
    Assignee: Soraa, Inc.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Wenkan Jiang, Bradley C. Downey