Patents by Inventor Dirk Ewoud Boonzajer Flaes

Dirk Ewoud Boonzajer Flaes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection method, inspection apparatus and illumination method and apparatus
    Patent number: 10459347
    Abstract: In an inspection apparatus, a target on the surface is illuminated with illuminating radiation that comprises first and second illuminating components. The illuminating components form one or more periodic illuminating patterns on the surface. A plurality of scattered radiation patterns formed by the illuminating radiation after scattering by the target is captured at a detector for a number of values of a controllable characteristic of at least one of the illuminating components. The captured radiation is then used to reconstruct data describing the target.
    Type: Grant
    Filed: March 8, 2017
    Date of Patent: October 29, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Dirk Ewoud Boonzajer Flaes, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema
  • Inspection Method, Inspection Apparatus and Illumination Method and Apparatus
    Publication number: 20170269482
    Abstract: In an inspection apparatus, a target on the surface is illuminated with illuminating radiation that comprises first and second illuminating components. The illuminating components form one or more periodic illuminating patterns on the surface. A plurality of scattered radiation patterns formed by the illuminating radiation after scattering by the target is captured at a detector for a number of values of a controllable characteristic of at least one of the illuminating components. The captured radiation is then used to reconstruct data describing the target.
    Type: Application
    Filed: March 8, 2017
    Publication date: September 21, 2017
    Applicants: Stichting VU, Universiteit van Amsterdam, Stichting voor Fundamenteel Onderzoek der Materie, ASML Netherlands B.V.
    Inventors: Dirk Ewoud Boonzajer Flaes, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema