Abstract: A laser system with compensated optics contains at least one optical element which is thermally coupled to a heat source in order to thermally compensate for a deformation of optical elements disposed in a beam path of the laser system. The deformation is brought about by the laser beam.

Abstract: A preinoization device, in particular for X-ray preionization in discharge-pumped gas lasers, especially excimer lasers, is connected to a pulse generating network of an excitation circuit for gas lasers. A high voltage pulse transformer has a primary winding connected between a storage capacitor and a high-voltage switch in the pulse generating network. The pulse transformer emits preionizing pulses on the secondary side that lead to the firing of the laser glow discharge for a preionizing device, in particular an X-ray tube. The pulse transformer is constructed for this purpose as a saturable magnetic inductor with at least one secondary winding. If the high voltage switch is closed, when the pulse transformer is unsaturated its primary winding has its maximum inductance, so that there will be a secondary side voltage pulse at this time because of the law of induction.

Abstract: An apparatus and method for generating high-power, high-voltage pulses for a laser having laser electrodes with an electrode path includes at least one charge unit. A pulse-generating network has an input side connected to the at least one charge unit and an output side connected to the laser electrodes. The pulse-generating network has a first branch and a second branch connected parallel to one another and connected to the laser electrodes. The first branch has a first charge capacitor with a relatively high capacitance and a magnetic switch in the form of a saturatable inductor connected in series with the first charge capacitor. The second branch has a second charge capacitor with a relatively low capacitance. A trigger branch is connected parallel to the electrode path. The trigger branch has at least one high-voltage switch and an in-series inductance.

Abstract: A plasma X-ray tube, which can be referred to as a one-chamber ionizing tube for pre-ionizing TE lasers, in particular excimer lasers, includes an extended, box-like housing with a U-shaped hollow cathode which is disposed in the interior of the housing and is also elongated. The open side of the hollow electrode faces an X-ray target which is in the form of a gas-tight foil. Between the X-ray target and the hollow cathode is a long wire-shaped igniting electrode. When a positive voltage or a voltage pulse is applied to the igniting electrode, an electrical field is formed around it. Electrons that are present are forced onto a long, spiral path and gas atoms are ionized under the influence of the electrical field and because of ambient radiation. Electron avalanches form and lead to initiation of a wire discharge.

Abstract: An excitation circuit for TE lasers serves to generate a homogeneous high pressure glow discharge between laser electrodes within a gas space of a laser chamber. A fast acting high voltage switch of a pulse forming network is a multi-channel pseudo-spark switch and is preferably integrated with the laser. The switch is formed of a parallel circuit including a number of individual pseudo-spark switches with gaps. The total multi-channel pseudo-spark switch is filled with an ionizable low pressure gas filling at a given pressure. Voltage is applied to the anode and the cathode in such a way that the resulting gas discharge is located on the left-hand branch of the Paschen curve. The switch of the excitation circuit can also be used as a separate structural element for triggering an electrical high voltage switch circuit, and also for so-called flat plane laser systems.

Abstract: A plasma X-ray tube with high electron current densities includes a plasma chamber formed of a metal hollow cathode having an outer limiting wall with an X-ray target and a mutually spaced apart and opposed inner limiting wall with at least one metal acceleration grid being highly transparent to electron and ion radiation and being in alignment with the X-ray target defining a path. At least one ignition electrode in the form of a thin wire protrudes into the plasma chamber at positive potential relative to the hollow cathode. At least one anode retained in an insulated and gas-tight manner in one of the side walls of the hollow cathode is disposed laterally of the alignment of the target and grid and at positive potential relative to the hollow cathode. An acceleration chamber adjoins and communicates with the plasma chamber through the acceleration grid. The acceleration chamber is surrounded by metal walls in electrical and gas-tight connection with the limiting walls of the hollow cathode.