Patents by Inventor Dirk Gleitsmann

Dirk Gleitsmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selecting manufacturing settings based on historical data from manufacturing tools
    Patent number: 10481592
    Abstract: Methods according to the disclosure include: identifying at least one non-candidate tool which previously processed at least one prior semiconductor wafer, and represented in a set of historical data, the set of historical data including manufacturing settings for performing an operation on the at least one prior semiconductor wafer, and a candidate tool which has not previously performed the operation on at least one prior semiconductor wafer, the candidate tool not being represented in the set of historical data; determining whether the set of historical data predicts the performing of the operation with the candidate tool based on the manufacturing settings for performing the operation on the at least one prior semiconductor wafer; and in response to the set of historical data predicting the performing of the operation with the candidate tool, selecting a manufacturing setting for the candidate tool based on the set of historical data.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: November 19, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Richard P. Good, Dirk Gleitsmann, Daniel Zschaebitz
  • SELECTING MANUFACTURING SETTINGS BASED ON HISTORICAL DATA FROM MANUFACTURING TOOLS
    Publication number: 20190129390
    Abstract: Methods according to the disclosure include: identifying at least one non-candidate tool which previously processed at least one prior semiconductor wafer, and represented in a set of historical data, the set of historical data including manufacturing settings for performing an operation on the at least one prior semiconductor wafer, and a candidate tool which has not previously performed the operation on at least one prior semiconductor wafer, the candidate tool not being represented in the set of historical data; determining whether the set of historical data predicts the performing of the operation with the candidate tool based on the manufacturing settings for performing the operation on the at least one prior semiconductor wafer; and in response to the set of historical data predicting the performing of the operation with the candidate tool, selecting a manufacturing setting for the candidate tool based on the set of historical data.
    Type: Application
    Filed: October 27, 2017
    Publication date: May 2, 2019
    Inventors: Richard P. Good, Dirk Gleitsmann, Daniel Zschaebitz