Abstract: Diffuser device comprising a first lens array (3) having a plurality of lenses (6) and a second lens array (5) having a plurality of lenses (7) through which light passes successively during operation of the diffuser device, the diffuser device comprises a first transparent substrate (10) having an entrance surface (2) and an exit surface (4) and a second transparent substrate (11) having an entrance surface (2) and an exit surface (4), wherein the first lens array (3) is disposed on the first substrate (10) and the second lens array (5) is disposed on the second substrate (11), or wherein the second lens array (5) is disposed on the first substrate (10) and the first lens array (3) is disposed on the second substrate (11), and wherein the first substrate (10) and the second substrate (11) are spaced apart from one another, in particular an air gap (12) being arranged between the first substrate (10) and the second substrate (11).

Abstract: Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4?, 4?) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.

Abstract: Device for illuminating an area, in particular for illuminating a mask (14), for example for a lithographic application, with at least one light source (1) for producing light (3) that can be used for the illumination, optics means (2) for shaping the light (3) produced by the at least one light source (1), and separation means (4, 4?, 4?) capable of dividing the light (3) to be used for the illumination into several mutually separated partial beams (5), so that these partial beams (5) can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.

Abstract: A device for altering an intensity distribution of a laser radiation field contains two substrates with differing refractive indices and with two opposed, mutually corresponding optical functional boundary surfaces, which are at least partly curved. The laser radiation field for altering can pass serially through the optical functional boundary surfaces, whereby a difference in the refractive indices of the first and second substrate is less than 0.1 and the cavity, between the first optical functional boundary surface and the second optical functional boundary surface is embodied such that the laser radiation, on propagation from the first substrate into the second substrate, is essentially subjected to one refraction on the basis of the difference in the refractive indices of the first and second substrate.

Abstract: A device for altering an intensity distribution of a laser radiation field contains two substrates with differing refractive indices and with two opposed, mutually corresponding optical functional boundary surfaces, which are at least partly curved. The laser radiation field for altering can pass serially through the optical functional boundary surfaces, whereby a difference in the refractive indices of the first and second substrate is less than 0.1 and the cavity, between the first optical functional boundary surface and the second optical functional boundary surface is embodied such that the laser radiation, on propagation from the first substrate into the second substrate, is essentially subjected to one refraction on the basis of the difference in the refractive indices of the first and second substrate.

Abstract: The invention relates to an apparatus for shaping a light beam, having at least two optically functional boundary surfaces that are arranged one behind another in the propagation direction (z) of the light beam to be shaped, such that the light beam can pass through the at least two optically functional boundary surfaces one after another, and two groups of refractive or diffractive imaging elements that are arranged on at least one of the optically functional boundary surfaces, at least two of the imaging elements having different properties within at least one of the groups.

Abstract: The invention relates to an apparatus for shaping a light beam, having at least two optically functional boundary surfaces that are arranged one behind another in the propagation direction (z) of the light beam to be shaped, such that the light beam can pass through the at least two optically functional boundary surfaces one after another, and two groups of refractive or diffractive imaging elements that are arranged on at least one of the optically functional boundary surfaces, at least two of the imaging elements having different properties within at least one of the groups.

Abstract: An imaging system, especially an imaging system for imaging electromagnetic radiation in the optical spectral range, includes at least one lens element and at least one first and one second optically functional boundary surface through which the electromagnetic radiation can pass. At least the first and at least the second optically functional interface can be located either on one or on two or more lens elements. At least the first and at least the second optically functional interface have, at least in sections, a cylinder lens geometry or a cylinder lens-like geometry so that these optically functional interfaces each have a direction lying in the interfaces and along which at least in sections the curvature of the surface is essentially constant. The direction of essentially constant curvature of at least the first optically functional interface to the direction of essentially constant curvature of at least the second optically functional interface being aligned roughly perpendicular to one another.

Abstract: An optical emitter array with collimation optics in which a number of extended emitters are arranged side-by-side in the x-direction, having a specified divergence (&agr;x) in this direction and a center-to-center separation (Px) greater than the emitter size (Ex) and in which the collimation optics include a cylindrical lens array with a number of convergent cylindrical-lens surfaces each assigned to an emitter and having its cylindrical axis lying in the y-direction, arranged in front of the emitter array, characterized in that a first cylindrical-lens array with focal length (FA) is positioned in front of the emitters within an overlap distance (a) at which the ray bundles emerging from the emitters overlap at a separation (c) that is small in comparison to said focal length FA], a second cylindrical-lens array having the same focal length (FA) is positioned with a telescopic arrangement at a distance of this focal length (FA) away from the first cylindrical-lens array.