Abstract: In an apparatus for mounting discoidal substrates in a vacuum chamber for reactive ionic etching purposes, a substrate holder joined to a hollow shaft and a bottom plate under the substrate holder are disposed, which together with spacers and a clamping ring form a displaceable cage partially surrounding the substrate holder and held coaxial to the latter, while the substrate which can be introduced through a gap in the lateral wall of the cage betwen two spacers can be laid on the substrate holder and locked in place there by the clamping ring after a relative movement between the substrate holder and the cage.

Abstract: An inserter for vacuum installations has a two-part arm provided with a driving and, a single joint and an end for holding an object. The arm can turn in at least one horizontal plane about a vertical main axis disposed in the area of the driving end, and has at least one motor for moving the arm about the main axis and changing the angle between the parts of the arm at the joint.

Abstract: A swivel head for industrial robots has two degrees of freedom, which are associated with respective spindles having intersecting axes. A first spindle serves to swivel a tool and a second spindle serves to rotate the tool. The swivel head also comprises two concentric drive shafts, which extend one in the other and carry bevel gears. One of said bevel wheels is a driving bevel gear for directly driving the second spindle by means of a bevel gear mounted on said second spindle. The other bevel gear drives a swiveling bevel gear mounted on the first spindle. In that swivel head a speed-reducing tansmission having a high reduction ratio is connected to the second spindle and serves to drive a tool carrier. The swiveling bevel gear directly carries a bearing bracket, which carries the tool shaft and intermediate gears of the transmission. The housing of the swivel head consists of a rigid part and a movable part.